한국레이저가공학회지 (Laser Solutions)

한국레이저가공학회 (Korean Society of Laser Processing)
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Laser microstructuring of trench and its application to optical waveguide

  • 최훈국 (광주과학기술원 고등광기술연구소) ;
  • 유동윤 (광주과학기술원 고등광기술연구소) ;
  • 손익부 (광주과학기술원 고등광기술연구소) ;
  • 노영철 (광주과학기술원 고등광기술연구소) ;
  • 김영식 ((주) PPI3.전남대학교) ;
  • 김수용 ((주) PPI3.전남대학교) ;
  • 김완춘 ((주) PPI3.전남대학교) ;
  • 김진봉 ((주) PPI3.전남대학교)
  • 투고 : 2015.03.11
  • 심사 : 2015.03.26
  • 발행 : 2015.03.31
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초록

In this paper, micro trench structure is fabricated by femtosecond laser for inserting optical reflecting wavelength filter in planar waveguide. The width and depth of the trench is controlled by femtosecond laser machining condition. Also, large scale of single channel with 500um and 1000um on silica plate is fabricated by femtosecond laser, and roughness of the channel surface is polished by $CO_2$ laser for the insertion of the filter. Then, the characteristic of the planar waveguide inserted the filter is verified.

키워드

참고문헌

  1. Y.J. Kim, Y.S. Kim, S.M. Kim, and S.W. Kim, "Ultrafast femtosecond lasers: Fundamentals and applications," Journal of the Korean Society for Precision Engineering Vol. 27, No 6, pp. 7-16, 2010.
  2. Gattass, R.R. and Mazur, E., "Femtosecond laser micromachining in transparent materials," Nature Photonics Vol. 2, No. 4, pp. 219-225, 2008. https://doi.org/10.1038/nphoton.2008.47
  3. Sung-Hak Cho, Jung-Kyu Park, Jae-Gu Kim, Won-Seok Chang, Doo-Sun Choi and Kyung-Hyun Whang, "Ultra-precision Machining using a Femtosecond Laser," Journal of the Korean Society for Precision Engineering Vol. 27, No. 6, pp. 17-23, 2010.
  4. Ik-Bu Sohn, Md. Shamim Ahsan, Young-Chul Noh, Hun-Kook Choi, Jin-Tae Kim, Myeong Jin Ko, "Fabrication of Fresnel zone plate lens in fused silica glass using femtosecond laser lithography technology," Optical Engineering, 53(5) 055107 pp. 1-10, 2014. https://doi.org/10.1016/j.optlaseng.2013.07.020
  5. Kyung Chan Kim, Kyung Ho Kim, Ji Soo Ha, Ik Bu Sohn, Hae Woon Choi and Tae Kwon Kim, "Machining Technology of Micro Combustion Nozzle Using a Femtosecond Laser," Journal of the Korean Society for Precision Engineering Vol. 27, No. 11, pp. 24-29, 2010.
  6. Hun-Kook Choi, Ik-Bu Sohn, Young-Chul Noh, Yong-Tak Lee, Jin-Tae Kim, and Md. Shamim Ahsan, "Femtosecond-laser-assisted Fabrication of Double-layer Diffraction Gratings inside Fused Silica Glass," Journal of the Korean Physical Society, Vol. 66, No. 1, pp. 55-60, 2015. https://doi.org/10.3938/jkps.66.55
  7. Joong Wook Lee, Jin-Kyu Yang, Ik-Bu Sohn, Hyung Keun Yoo, Chul Kang, and Chul-Sik Kee, "Monopole resonators in planar plasmonic metamaterials," Optics Express, 22(15), pp. 18433-18439, 2014. https://doi.org/10.1364/OE.22.018433
  8. Hun-Kook Choi, Deok Jung, Ik-Bu Sohn, Young- Chul Noh, Yong-Tak Lee, Jin-Tae Kim, and Md. Shamim Ahsan, "Diffraction Efficiency Enhancement of Femtosecond Laser-engraved Diffraction Gratings Due to $CO_2$ Laser Polishing," Journal of the Korean Physical Society, Vol. 65, No. 10, pp. 1559-1565, 2014. https://doi.org/10.3938/jkps.65.1559