열화학기상증착법에 의한 백금 기판 위의 그래핀 합성

Graphene Synthesis on Pt Substrate using a Chemical Vapor Deposition Method

  • 이병주 (강원대학교 대학원 신소재공학과) ;
  • 정구환 (강원대학교 나노응용공학과)
  • 발행 : 2015.02.28

초록

Graphene is a carbon-based two dimensional honeycomb lattice with monoatomic thickness and has attracted much attention due to its superior mechanical, electronic, and physical properties. Here, we present a synthesis of high quality graphene on Pt substrate using a chemical vapor deposition (CVD). We optimized synthesis condition with various parameters such as synthesis temperature, time, and cooling rate. Based on the results, we concluded that graphene synthesis is driven by mainly carbon adsorption on surface rather than precipitation of carbon which is dominant in other metal substrate. In addition, Pt substrate can be repeatedly used several times with high quality graphene.

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