Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Direct Growth of Graphene on Insulating Substrate by Laminated (Au/Ni) Catalyst Layer

  • Ko, Yong Hun (Department of Physics, Sungkyunkwan University) ;
  • Kim, Yooseok (Advanced Nano-Surface Research Group, Korea Basic Science Institute (KBSI)) ;
  • Jung, Daesung (Department of Energy Science, Sungkyunkwan University) ;
  • Park, Seung Ho (Department of Physics, Sungkyunkwan University) ;
  • Kim, Ji Sun (Department of Physics, Sungkyunkwan University) ;
  • Shim, Jini (Department of Physics, Sungkyunkwan University) ;
  • Yun, Hyeju (Department of Physics, Sungkyunkwan University) ;
  • Song, Wooseok (Thin Film Materials Laboratory, Korea Research Institute of Chemical Technology) ;
  • Park, Chong-Yun (Department of Physics, Sungkyunkwan University)
  • Received : 2015.07.28
  • Accepted : 2015.07.29
  • Published : 2015.07.30
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Abstract

A direct growth method of graphene on insulating substrate without catalyst etching and transfer process was developed using Au/Ni/a-C catalyst system. During the growth process, behavior of the Au/Ni catalyst was investigated using EDX, XPS, SEM, and Raman spectroscopy. The Au/Ni catalyst layer was evaporated during growth process of graphene. The graphene film was composed mono-layer flakes. The transmittance of the graphene film was ~80.6%.

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References

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