Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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Study on characteristics of thin films for reflection of near infrared light

근적외선 반사 박막 특성 연구

  • Chung, Youn-Gil (Dept. of Electrical, Electronic and Control Engineering, Graduate School of Future Convergence Technology, Institute for information technology convergence, Hankyong National University) ;
  • Park, Hyun-Sik (Dept. of Electrical, Electronic and Control Engineering, Graduate School of Future Convergence Technology, Institute for information technology convergence, Hankyong National University)
  • 정연길 (한경대학교 전기전자제어공학과, 미래융합기술대학원, IT융합기술연구소) ;
  • 박현식 (한경대학교 전기전자제어공학과, 미래융합기술대학원, IT융합기술연구소)
  • Received : 2015.01.27
  • Accepted : 2015.06.11
  • Published : 2015.06.30
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Abstract

Near infrared blocking function in energy saving window glass is required. The design, deposition and characteristics of optical thin films for reflection of near-infrared light were studied. The optical thin film is designed as laminated film structure with low refractive index film and high index film. Deposition experiments of $SiO_2$ and $TiO_2$ thin films with designed structure using the RF sputtering method were carried out. The characteristics of the thin film with deposition conditions were analyzed. High-refractive-index thin film of $TiO_2$/low refractive-index thin film of $SiO_2$ and high-refractive-index thin film of $TiO_2$ structure for reflection of near-infrared light was designed to be simulated. Results of simulation showed reflectance of 30% or more in the range from 930nm to 1682nm. Triple layer thin films fabricated with simulated results showed wavelength bands from 930nm to 1525nm for the reflectance of 33% or more.

에너지 절감 유리창에서는 근적외선 차단 기능이 요구되고 있다. 본 연구에서는 근적외선 반사를 위한 광학 박막의 설계, 제작 및 광학적 특성이 연구 되었다. 광학 박막은 저굴절률막과 고굴절률막의 적층 박막 구조로 설계하였다. 설계구조에 따라 RF 스퍼터링 방법을 이용한 $SiO_2$와 $TiO_2$ 박막의 증착 실험이 수행되었고 파워에 따른 증착 조건 파라미터에 따라서 제작된 스퍼터링 박막의 특성이 분광타원기, 원자현미경, 분광기로 분석되었다. 적층박막 구조의 설계는 $SiO_2$와 $TiO_2$의 고굴절률 박막/저굴절률 박막/고굴절률 박막의 적층 구조로서 근적외선 차단 다층막이 설계되었고 시뮬레이션 되었다. 시뮬레이션 결과 파장대역 930nm에서 1682nm의 범위에서 반사율30%이상이 관찰되었다. 시뮬레이션 결과를 토대로 제작된 삼층 구조의 박막은 파장 대역이 930nm에서 1525nm범위 대역에서 반값 전폭의 반사율 33%이상을 구현할 수 있었다.

Keywords

References

  1. Hong Ye, Xianchun Meng, Bin Xu, "Theoretical discussions of perfect window, ideal near infrared solar spectrum regulating window and current thermochromic window", Energy and Buildings 49, pp.164-172, 2012. DOI: http://dx.doi.org/10.1016/j.enbuild.2012.02.011
  2. Jitka Mohelnikova,"Materials for reflective coatings of window glass applications," Construction and Building Materials, 23, PP.1993-1998, 2009. https://doi.org/10.1016/j.conbuildmat.2008.08.033
  3. M. Laamanen, M. Blomberg, R.L. Puurunen, A. Miranto, H. Kattelus, "Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra," Sensors and Actuators A162, pp.210-214, 2010. DOI: http://dx.doi.org/10.1016/j.sna.2010.02.015
  4. B.S. Richards,"Single-material $TiO_2$ double-layer antireflection coatings," Solar Energy Materials & Solar Cells 79, pp.369-390, 2003. DOI: http://dx.doi.org/10.1016/S0927-0248(02)00473-7
  5. C.G. Granqvist, P.C.Lansaker, N.R.Mlyuka, G.A.Niklasson, E.Avendano," Progress in chromogenics", Solar Energy Materials & SolarCells, 93, pp.2032-2039, 2009. DOI: http://dx.doi.org/10.1016/j.solmat.2009.02.026
  6. Kamalisarvestani, R.Saidur, S.Mekhilef, F.S.Javadi, "Performance,materials and coating technologies of thermochromic thin films on smartwindows," Renewable and Sustainable Energy Reviews, 26, pp.353-364, 2013. DOI: http://dx.doi.org/10.1016/j.rser.2013.05.038
  7. L. Liljeholm , T. Nyberg, T. Kubart, A. Roos b, S. Berg, "Reactive sputtering of $SiO_2eTiO_2$ thin film from composite $Six/TiO_2$ targets", Vacuum, 85, pp.317-321, 2010. DOI: http://dx.doi.org/10.1016/j.vacuum.2010.07.003
  8. M. VergoEhl,, N. Malkomes, T. Staedler, T. MattheAe, U. Richter, "Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered $TiO_2$ and $SiO_2$ films for process control," Thin Solid Films, 351, pp.42-47, 1999. DOI: http://dx.doi.org/10.1016/S0040-6090(99)00152-2
  9. Sang-Hun Jeonga, Jae-Keun Kimb, Bong-Soo Kima, Seok-Ho Shima, Byung-Teak Lee, "Characterization of $SiO_2$ and $TiO_2$ films prepared using rf magnetron sputtering and their application to anti-reflection coating," Vacuum, 76, pp.507-515, 2004. DOI: http://dx.doi.org/10.1016/j.vacuum.2004.06.003
  10. H. A. Macleod, "Thin film narrow band optical filters," Thin Solid Films 34, pp.335-342, 1976. DOI: http://dx.doi.org/10.1016/0040-6090(76)90482-X
  11. H. A. Macleod, "Thin-Film Optical Filters," 2nd. Chap.8, pp.334-34 London, 1986. DOI: http://dx.doi.org/10.1887/0750306882
  12. Xinrong Wang, Hiroshi Masumoto, Yoshihiro So meno, Lidong Chen, and Toshio Hirai, "Stepwise graded refractive-index profiles for design of a narrow-band pass filter," Applied Optics.,Vol.40, No.22 pp3746-pp3752, 2001. DOI: http://dx.doi.org/10.1364/AO.40.003746