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Development of Continuous and Scalable Nanomanufacturing Technologies Inspired by Traditional Machining Protocols Such as Rolling, Pullout, and Forging

롤압연, 압출, 단조 등 전통 기계가공법의 모사 응용을 통한 다양한 나노패턴의 대면적 연속생산 기술 구현

  • Ok, Jong G. (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology) ;
  • Kwak, Moon Kyu (Department of Mechanical Engineering, Kyungpook National University) ;
  • Guo, L. Jay (Department of Mechanical Engineering: Electrical Engineering and Computer Science, University of Michigan)
  • Received : 2015.01.02
  • Accepted : 2015.02.06
  • Published : 2015.04.15

Abstract

We present a series of simple but novel nanopatterning methodologies inspired by traditional mechanical machining processes involving rolling, pullout, and forging. First, we introduce roll-to-roll nanopatterning, which adapts conventional rolling for continuous nanopatterning. Then, nano-inscribing and nano-channel lithography are demonstrated, whereby seamless nanogratings can be continuously pulled out, as in a pullout process. Finally, we discuss vibrational indentation micro- and nanopatterning. Similarly to the forging/indentation process, this technique employs high-frequency vertical vibration to indent periodic micro/nanogratings onto a horizontally fed substrate. We discuss the basic principles of each process, along with its advantages, disadvantages, and potential applications. Adopting mature and reliable traditional technologies for small-scale machining may allow continuous nanopatterning techniques to cope with scalable and low-cost nanomanufacturing in a more productive and trustworthy way.

Keywords

References

  1. Ok, J. G., Ahn, S. H., Kwak, M. K., Guo, L. J., 2013, Continuous and High-Throughput Nano-patterning Methodologies Based On Mechanical Deformation, J. Mater. Chem. C, 1:46 7681-7691. https://doi.org/10.1039/c3tc30908h
  2. Ok, J. G., Youn, H. S., Kwak, M. K., Lee, K.-T., Shin, Y. J., Greenwald, A., Liu, Y., Guo, L. J., 2012, Continuous and Scalable Fabrication of Flexible Metamaterial Films Via Roll-to-Roll Nanoimprint Process for Broadband Plasmonic Infrared Filters, Appl. Phys. Lett., 101:22 223102. https://doi.org/10.1063/1.4767995
  3. Resnick, D. J., Sreenivasan, S., V., Willson, C. G., 2005, Step & Flash Imprint Lithography, Materials Today, 8 34-42.
  4. Ito, T., Okazaki, S., 2000, Pushing the Limits of Lithography, Nature, 406:6799 1027-1031. https://doi.org/10.1038/35023233
  5. Kwak, M. K., Ok, J. G., Lee, S. H., Guo, L. J., 2015, Visually Tolerable Tiling (VTT) for Making Large-area Flexible Patterned Surface, Materials Horizons, 2:1 86-90. https://doi.org/10.1039/C4MH00159A
  6. Ahn, S. H., Guo, L. J., 2009, Dynamic Nanoinscribing for Continuous and Seamless Metal and Polymer Nanogratings, Nano Letters, 9:12 4392-4397. https://doi.org/10.1021/nl902682d
  7. Ok, J. G., Park, H. J., Kwak, M. K., Pina-Hernandez, C. A., Ahn, S. H., Guo, L. J., 2011, Continuous Patterning of Nanogratings Bby Nanochannel-guided Lithography on Liquid Resists, Adv. Mater., 23:38 4444-4448. https://doi.org/10.1002/adma.201102199
  8. Ahn, S. H., Ok, J. G., Kwak, M. K., Lee, K.-T., Lee, J. Y., Guo, L. J. 2013, Template-free Vibrational Indentation Patterning (VIP) of Micro/Nano-scale Grating Structures With Real-time Pitch and Angle Tenability, Adv. Funct. Mater., 23:37 4739-4744. https://doi.org/10.1002/adfm.201300293