Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Simulation of Motion Accuracy Considering Loads in Linear Motion Units

부하를 고려한 직선운동유니트의 정밀도 시뮬레이션 기술

  • Khim, Gyungho (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Park, Chun Hong (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials) ;
  • Oh, Jeong Seok (Department of Ultra-precision Machines and Systems, Korea Institute of Machinery and Materials)
  • 김경호 (한국기계연구원 초정밀시스템연구실) ;
  • 박천홍 (한국기계연구원 초정밀시스템연구실) ;
  • 오정석 (한국기계연구원 초정밀시스템연구실)
  • Received : 2015.04.16
  • Accepted : 2015.04.21
  • Published : 2015.05.01
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Abstract

This paper presents the motion accuracy simulation considering loads such as workpiece weight, cutting force, cogging force of a linear motor, and force caused by misalignment and runout error of a ballscrew in linear motion units. The transfer function method is basically utilized to estimate 5-DOF motion errors, together with the equilibrium equations of force and moment on the table. The transfer function method is modified in order to consider clearance changed according to the loads in the double sided hydrostatic/aerostatic bearings. Then, the analytic model for predicting the 5-DOF motion errors is proposed with the modified transfer function method. Motion errors were simulated under different loading conditions in the linear motion units using hydrostatic, aerostatic, and linear motion bearings, respectively. And the proposed analytic model was verified by comparing the estimated and measured motion errors.

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References

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