Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Nitrogen Monoxide Gas Sensing Properties of Copper Oxide Thin Films Fabricated by a Spin Coating Method

스핀코팅법으로 제작한 산화구리 박막의 일산화질소 가스 감지 특성

  • Hwang, Hyeonjeong (Graduate School of Advanced Circuit Substrate Engineering, Chungnam National University) ;
  • Kim, Hyojin (Graduate School of Advanced Circuit Substrate Engineering, Chungnam National University) ;
  • Kim, Dojin (Graduate School of Advanced Circuit Substrate Engineering, Chungnam National University)
  • 황현정 (충남대학교 차세대기판학과) ;
  • 김효진 (충남대학교 차세대기판학과) ;
  • 김도진 (충남대학교 차세대기판학과)
  • Received : 2015.01.21
  • Accepted : 2015.03.23
  • Published : 2015.04.27
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Abstract

We present the detection characteristics of nitrogen monoxide(NO) gas using p-type copper oxide(CuO) thin film gas sensors. The CuO thin films were fabricated on glass substrates by a sol-gel spin coating method using copper acetate hydrate and diethanolamine as precursors. Structural characterizations revealed that we prepared the pure CuO thin films having a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the NO gas sensing measurements that the p-type CuO thin film gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $100^{\circ}C$. Additionally, these CuO thin film gas sensors were found to show reversible and reliable electrical response to NO gas in a range of operating temperatures from $60^{\circ}C$ to $200^{\circ}C$. It is supposed from these results that the p-type oxide semiconductor CuO thin film could have significant potential for use in future gas sensors and other oxide electronics applications using oxide p-n heterojunction structures.

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References

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