한국레이저가공학회지 (Laser Solutions)

한국레이저가공학회 (Korean Society of Laser Processing)
권호 표지

초소형 전자빔을 이용한 멀티 전자빔 운영 시스템 설계

Operating System Design of Multi Beam Control System with Miniaturized Electron Beam Columns

  • 임선종 (한국기계연구원 광응용기계실) ;
  • 김호섭 (선문대학교 나노과학과)
  • Lim, Sun Jong (Department of Laser & Electron Beam Application, KIMM) ;
  • Kim, Ho Seob (Department of Nanoscience, Sunmoon University)
  • 투고 : 2015.12.14
  • 심사 : 2015.12.24
  • 발행 : 2015.12.31
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초록

The research on multi electron beam systems is being carried out by various methods. We are studying multi electron beam system using miniaturized electron beam columns. The column consists of electrostatic lenses, electrostatic deflector and tip emitter. Our operating system controls 4 column array, captures images of each column and maintains the instrument. We present the usefulness of our operating system for multi columns by capturing images of each column.

키워드

참고문헌

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  5. Taesik, O., Hoseob Kim., Seungjoon, Ahn. And Daewook, Kim., "Design of an ultra-miniaturized electron optical microscolumn with sub-5 nm very high resolution," Ultramicroscopy 136, pp. 171-175, 2014. https://doi.org/10.1016/j.ultramic.2013.10.003