Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Lost Motion Analysis for Nonlinearity Identification of a 6-DOF Ultra-Precision Positioning Stage

6-자유도 초정밀 위치 결정 스테이지의 비선형성 식별을 위한 로스트 모션 해석

  • Shin, Hyun-Pyo (School of Robot and Automation Engineering, Dongyang Mirae University) ;
  • Moon, Jun-Hee (School of Mechatronics, Yuhan University)
  • 신현표 (동양미래대학교 로봇자동화공학부) ;
  • 문준희 (유한대학교 메카트로닉스학부)
  • Received : 2014.10.10
  • Accepted : 2015.02.02
  • Published : 2015.03.01
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Abstract

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

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References

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