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Fabrication of a liquid microthruster array by MEMS manufacturing process

MEMS 공정을 이용한 마이크로 액체 추력기 배열체 제작

  • 허정무 (한국과학기술원 항공우주공학과) ;
  • 권세진 (한국과학기술원 항공우주공학과)
  • Received : 2014.12.12
  • Accepted : 2015.03.11
  • Published : 2015.06.30

Abstract

Micro planar type liquid propellant thruster was fabricated by MEMS manufacturing process for micro/nano satellites applications. 90 wt.% hydrogen peroxide was used as propellant and for propellant decomposition, Pt/Al2O3 was used as catalyst. Micro thruster structure was made by 5 photosensitive glasses patterned with thruster component profiles. Objective thrust was 50 mN and required hydrogen peroxide mass flow was 2.1 ml/min, which was supplied by syringe pump and teflon tube in experimental test. Performance test said that average steady thrust was approximately 30 mN, around 60% of objective thrust, and transient time was about 5 sec. It is estimated that extended response time was due to high thermal energy loss of micro scale thruster and low enthalpy input by propellant mass flow.

Keywords

References

  1. Esper J, Panetta P V, Ryschkewitsch D M, Wiscombe D W and Neeck S, "NASA-GSFC nano-satellite technology for earth science missions", Acta Astronaut, vol. 46, pp. 287-96, 2000. https://doi.org/10.1016/S0094-5765(99)00214-3
  2. Tang W C, "Micromechanical devices at JPL for space exploration", IEEE Aerospace Conf., Aspen, CO, pp 461-70, 1998.
  3. Janson S, Helvajian H, Amimoto S, Smit G, Mayer D and Feuerstein S, "Microtechnology for space systems", IEEE Aerospace Conf., Aspen, CO, pp 409-18, 1998.
  4. Helvajian H and Robinson E Y, "Micro- and nanotechnology for space systems", Los Angeles, CA: The Aerospace Press, 1997.
  5. Mueller J, "Thruster options for microspacecraft: a review and evaluatino of exsiting hardware and emerging technologies", 33rd AIAA/ASME/SAE/ASEE Joint Propulsion Conf. and Exhibit, Seattle, USA, 1997.
  6. Zakirov V and Li L, "Propulsion challenges for small spacecraft", 2005 Tsinghua Science & Technology, vol. 11, pp. 507-14, 2006.
  7. Janson S W, Helvajian H, Hansen W W and Lodmell L J, "Microthrusters for nanosatellites The 2nd Int. Conf. on Integrated Micro Nanotechnology for Space Applications", Pasadena, CA, The Aerospace Corporation, 1999.
  8. Seong Up Ha, Min Chan Kwon, Kyoun Su Seo, Sang Yeop Han, "The Past and Future Perspectives of Hydrogen Peroxide as Rocket Propellants", 2009 KSAS pp.717-728, 2009.
  9. Hitt D L, Zakrzwski C M and Thomas M A, " MEMS-based satellite micrpropulsion via catalyzed hydrogen peroxide decomposition", Smart Mater Struct, vol. 10, pp.1163-75, 2001. https://doi.org/10.1088/0964-1726/10/6/305
  10. T. R. Dietrich et al., "Fabrication technologies for microsystems utilizing photoetchable glass," Microelectronic Engineering 30, 1996.
  11. Xupeng C, Yong L, Zhaoying Z and Ruili F, "A homogeneously catalyzed micro-chemical thruster", Sensor Actuat A: Phys, vol. 108, pp. 149-54, 2003. https://doi.org/10.1016/S0924-4247(03)00376-5
  12. S. An, Design and Microfabrication of Catalytic Reactor for a Micro Monopropellant Thruster, MS thesis at KAIST, 2006.
  13. Lee J, Kim S, Kwon S and Yu M, "Fabrication of catalyst-insertion-type microelectromechanical systems monopropellant thruster", J Propul Power, vol. 28, pp. 396-404, 2013.
  14. Lee J, Kim K and Kwon S, "Design, fabrication, and testing of MEMS solid propellant thruster array chip on glass wafer", Sensors Actuators A, vol. 157, pp. 126-34. 2010. https://doi.org/10.1016/j.sna.2009.11.010
  15. Dieter K. Huzel et al. Modern engineering for design of liquid-propellant rocket engines, AIAA, 1992.
  16. Sugyong An, "Design of H2O2 Monopropellant Thruster with Consideration of Response Characteristics for Attitude Control System", doctoral thesis, KAIST, 2010.