JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns

  • Cho, Chun-Hyung (Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University) ;
  • Cha, Ho-Young (School of Electronic & Electrical Engineering, College of Engineering, Hongik Unversity)
  • Received : 2014.08.13
  • Accepted : 2014.09.23
  • Published : 2015.02.28
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Abstract

In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%~70%. Also, in this paper, more simple and convenient stress-measurement method was presented.

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References

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