Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Research for Design and Characteristic Interpretation of Capacitive Pressure Sensor Structure

용량형 압력 센서의 설계 및 특성해석에 대한 기초적 연구

  • Park, Chang Yong (Department of Mechanical System, Kumoh National Institute of Technology) ;
  • Kweon, Hyun Kyu (Department of Mechanical System, Kumoh National Institute of Technology) ;
  • Zhao, Zhi Jun (Department of Mechanical System, Kumoh National Institute of Technology)
  • 박창용 (금오공과대학교 기계시스템공학과) ;
  • 권현규 (금오공과대학교 기계시스템공학과) ;
  • 조지준 (금오공과대학교 기계시스템공학과)
  • Received : 2015.03.09
  • Accepted : 2015.06.22
  • Published : 2015.06.30
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Abstract

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

Keywords

References

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