플라즈마 전기탐침 진단법

  • 발행 : 2015.12.31

초록

키워드

참고문헌

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  2. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York (2005).
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  4. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990). https://doi.org/10.1103/PhysRevLett.65.996