플라즈마 전기탐침 진단법

References

1. H. Mott-Smith and I. Langmuir, Phys. Rev. 28, 27 (1926).
2. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York (2005).
3. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. echnol. 1, 36 (1992). https://doi.org/10.1088/0963-0252/1/1/006
4. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990). https://doi.org/10.1103/PhysRevLett.65.996