디스플레이 공정 플라즈마 기초

참고문헌

1. 정진욱, 플라즈마 전자공학, 청문각 (2013).
2. 염근영, 플라즈마 식각기술, 미래컴 (2006).
3. M. A. Lieberman and A. J. Lichitenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York (2005).
4. F. F. Chen, Plasma Physics and Controlled Fusion, Plenum Press, New York (1984).
5. P. Chabert and N. Braithwaite, Physics of Radio frequency Plasmas, Cambridge University Press, Cambridge (2011).
6. Samer Banna, Ankur Agarwal, Gilles Cunge, Maxime Darnon, Erwine Pargon, and Olivier Joubert, J. Vac. Sci. Technol. A 30, 040801 (2012).
7. N. Hershkowitz, Plasma Diagnostics, edited by O. Auciello and D. L. Flamm Academic, San Diego (1989).
8. C. Lee and M. A. Lieberman, J. Vac. Sci. Technol. A 13(2), 368 (1995). https://doi.org/10.1116/1.579366