전기학회논문지P (The Transactions of the Korean Institute of Electrical Engineers P)

  • 제64권4호
  • /
  • Pages.277-280
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  • 2015
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  • 1229-800X(pISSN)
  • /
  • 2586-7792(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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RF 마그네트론 스퍼터링을 이용한 ITO 기판에 불순물 증착에 관한 연구

A Study of Impurity Deposition on ITO Substrate using RF Magnetron Sputtering

  • 투고 : 2015.10.17
  • 심사 : 2015.11.27
  • 발행 : 2015.12.01
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초록

In this paper, we have studied the surface property and transmittance of n- and p-type thin film deposited on ITO substrate. In n-type samples, the average particle size was large and uniform as RF power was increased, and the best results were shown at the condition of the temperature of $300^{\circ}C$ and 200 W of RF power. The transmittance of the sample deposited for 20 minutes was 74.82% and the light wave was increased to 800 nm. In p-type samples, the results were 71.21% and 789 nm at the deposition condition of the RF power of 250 W and the temperature of $250^{\circ}C$.

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참고문헌

  1. M.S.Jeon, S.Yoshiba and Koichi Kamisako,"Intrinsic amorphous silicon(a-Si:H) thin film prepared by using remote plasma chemical vapor deposition methond and used as a passivation layer for a heterojuncion solar cell",J.Korean Phys,Soc, 54, pp. 194-199, 2009 https://doi.org/10.3938/jkps.54.194
  2. C. Li, G. Fang, Y. Ren, Q.Fu and X. Zhah,"Silver nanoisland induced synthesis of ZnO nanostructures by vapor phase transport", J.Nanoscience and Nanotechnology, Vol. 6, PP.1467-1473, 2006 https://doi.org/10.1166/jnn.2006.312
  3. A. Bolonkin, "New concept of high speed AB solar cell",IEEE Transactions on Aerospace and Electronic Systems,Vol.44, pp.1538-1542, 2008 https://doi.org/10.1109/TAES.2008.4667728
  4. W. Shockley, H. J. Queisser, "Detailed Balance Limit of Efficiency of p-n Junction solar celles", J. Appl. Phys. 32, pp.510-519, 1961. https://doi.org/10.1063/1.1736034
  5. M. Lu, "Silicon Heterojunction Solar Cell and Crystallization of Amorphous Silicon", ProQuest, pp.61-70, 2008.
  6. A. McEvoy, L. Castaner, T. Markvart, "Solar cells(Materials, Manufacture and Operation)", Academic Press, pp. 5-18, 2012.