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Optimal Electron Beam Characteristics by Lenses Analysis Using Scanning Electron Microscopy

주사전자현미경 렌즈의 해석을 통한 최적의 빔 특성 연구

  • Bae, Jinho (Mechanical System Design Engineering Department, Seoul Nat'l Univ. of Science & Technology) ;
  • Kim, Dong Hwan (Mechanical System Design Engineering Department, Seoul Nat'l Univ. of Science & Technology)
  • 배진호 (서울과학기술대학교 기계시스템디자인공학과) ;
  • 김동환 (서울과학기술대학교 기계시스템디자인공학과)
  • Received : 2014.04.29
  • Accepted : 2014.10.24
  • Published : 2015.01.01

Abstract

This paper presents a design method for optimizing the focused beam characteristics, which are mainly determined by the condenser lenses in a scanning electron microscopy (SEM) design. Sharply reducing the probe diameter of electron beams by focusing the condenser lens (i.e., the rate of condensation) is important because a small probe diameter results in high-performance demagnification. This study explored design parameters that contribute to increasing the SEM resolution efficiently using lens analysis and the ray tracing method. A sensitivity analysis was conducted based on those results to compare the effects of these parameters on beam focusing. The results of this analysis on the design parameters for the beam characteristics can be employed as basic key information for designing a column in SEM.

이 논문은 SEM(Scanning Electron Microsopy) 경통부에서 전자빔의 집속특성을 최적화하기 위한 방법을 다루고 있다. SEM 에서 물체 표면을 확대하기 위해서는 경통부를 지나는 전자빔을 효과적으로 집속하여 표면에 충돌하는 프로브 직경을 줄이는 것이 중요하다. 이 전자빔의 집속정도를 나타내는 지표가 반배율이다. 본 연구는 전자빔의 집속특성을 효과적으로 구현하기 위해 그에 영향을 끼치는 경통부의 설계 인자들을 렌즈 해석과 광선 추적을 통해 알아본다. 이 결과를 근거로 민감도 분석을 수행하여 설계 인자들이 빔의 집속에 끼치는 영향의 정도를 정량적으로 비교해 볼 수 있다. 이러한 전자빔의 특성에 따른 설계 인자의 분석은 경통부 설계에 있어 중요한 기초 정보로 활용될 수 있다.

Keywords

References

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