Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Optimal Design for Parallelogram Type Flexure Hinge

Parallelogram형 Flexure Hinge 에 의한 Motion Stage 의 최적 설계

  • Choi, Ju Yong (Department of Mechatronics Engineering, Kyunsung University) ;
  • Eom, Sang In (Precision and Intelligence Lab., Tokyo Institute of Technology) ;
  • Kim, Jung Hyun (Department of Mechatronics Engineering, Kyunsung University)
  • 최주용 (경성대학교 메카트로닉스공학과) ;
  • 엄상인 (동경공업대학 정밀공학연구소) ;
  • 김정현 (경성대학교 메카트로닉스공학과)
  • Received : 2013.08.13
  • Accepted : 2014.10.11
  • Published : 2015.01.01
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Abstract

This paper proposes an optimal design for a precision motion stage employing a parallelogram flexure hinge. The voltage applied to the piezo element produces motion that is amplified through a 3-stage amplification structure. Especially, instead of the generally used conic section flexure hinge a parallelogram shaped flexure hinge is used that improves the flexibility of the lever. An Finite Element Analysis is performed on each motion stage lever where optimal design was achieved using Response Surface Methodology(RSM).

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References

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