Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on Manufacturing Method of Nano-Micro Hybrid Pattern Using Indentation Machining Method and AAO Process

누름가공과 AAO 공정을 이용한 나노-마이크로 복합패턴 제작방법 연구

  • Kim, Han-Hee (Department of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Jeon, Eun-Chae (Department of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Choi, Dae-Hee (Department of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Jang, Woong-Ki (Department of Mechanical and Mechatronics Engineering, Kangwon National University) ;
  • Park, Yong-Min (Department of Mechanical and Mechatronics Engineering, Kangwon National University) ;
  • Je, Tae-Jin (Department of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Choi, Doo-Sun (Department of NanoManufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Kim, Byeong-Hee (Department of Mechanical and Mechatronics Engineering, Kangwon National University) ;
  • Seo, Young-Ho (Department of Mechanical and Mechatronics Engineering, Kangwon National University)
  • 김한희 (한국기계연구원 나노공정연구실) ;
  • 전은채 (한국기계연구원 나노공정연구실) ;
  • 최대희 (한국기계연구원 나노공정연구실) ;
  • 장웅기 (강원대학교 기계메카트로닉스 공학과) ;
  • 박용민 (강원대학교 기계메카트로닉스 공학과) ;
  • 제태진 (한국기계연구원 나노공정연구실) ;
  • 최두선 (한국기계연구원 나노공정연구실) ;
  • 김병희 (강원대학교 기계메카트로닉스 공학과) ;
  • 서영호 (강원대학교 기계메카트로닉스 공학과)
  • Received : 2014.07.11
  • Accepted : 2014.10.22
  • Published : 2015.01.01
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Abstract

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.

Keywords

References

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