Structural Engineering and Mechanics

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Analysis of an electrically actuated fractional model of viscoelastic microbeams

  • Received : 2013.09.15
  • Accepted : 2014.06.23
  • Published : 2014.12.10
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Abstract

The MEMS structures usually are made from silicon; consideration of the viscoelastic effect in microbeams duo to the phenomena of silicon creep is necessary. Application of the fractional model of microbeams made from viscoelastic materials is studied in this paper. Quasi-static and dynamical responses of an electrically actuated viscoelastic microbeam are investigated. For this purpose, a nonlinear finite element formulation of viscoelastic beams in combination with the fractional derivative constitutive equations is elucidated. The four-parameter fractional derivative model is used to describe the constitutive equations. The electric force acting on the microbeam is introduced and numerical methods for solving the nonlinear algebraic equation of quasi-static response and nonlinear equation of motion of dynamical response are described. The deflected configurations of a microbeam for different purely DC voltages and the tip displacement of the microbeam under a combined DC and AC voltages are presented. The validity of the present analysis is confirmed by comparing the results with those of the corresponding cases available in the literature.

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References

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