Progress in Medical Physics (한국의학물리학회지:의학물리)

Korean Society of Medical Physics (한국의학물리학회)
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The Scattering Beam Measurement of the RBC and the Fabrication of the Micro Cell Biochip

적혈구의 산란빔 측정과 마이크로 세포 분석 바이오칩 제작

  • Byun, In Soo (Department of Biomedical Engineering, Yeungnam University) ;
  • Kwon, Ki Jin (Department of Biomedical Engineering, Yeungnam College of Science & Technology) ;
  • Lee, Joon Ha (Department of Biomedical Engineering, Yeungnam University)
  • Received : 2014.05.09
  • Accepted : 2014.06.02
  • Published : 2014.06.30
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Abstract

Next future, The bio technology will be a rapidly developing. This paper is the scattering beam measurement of the red blood cell (RBC) and the fabrication of the micro cell biochip using the bio micro electro mechanical system (Bio-MEMS) process technology. The Major process method of Bio-MEMS technology was used the buffered oxide etchant (BOE), electro chemical discharge (ECD) and ultraviolet sensitive adhesives (UVSA). All experiments were the 10 times according to the process conditions. The experiment and research are required the ultraviolet expose, the micro fluid current, the cell control and the measurement of the output voltage Vpp (peak to peak) waveform by scattering angles. The transmitting and receiving of the laser beam was used the single mode optical fiber. The principles of the optical properties are as follows. The red blood cells were injected into the micro channel. The single mode optical fiber was inserting in the guide channel. The He-Ne laser beam was focusing in the single mode optical fiber. The transmission He-Ne laser beam is irradiating to the red blood cells. The manufactured guide channel consists of the four inputs and the four outputs. The red blood cell was allowed with the cylinder pump. The output voltage Vpp waveform of the scattering beam was measured with a photo detector. The receiving angle of the output optical fiber is $0^{\circ}$, $5^{\circ}$, $10^{\circ}$, $15^{\circ}$. The magnitude of the output voltage Vpp waveform was measured in the decrease according to increase of the reception angles. The difference of the output voltage Vpp waveform is due differences of the light transmittance of the red blood cells.

본 본문은 Bio-MEMS 공정으로 제작한 마이크로 세포 분석 바이오칩을 사용하여 적혈구의 광학적 특성을 전압으로 측정한 실험이다. Bio-MEMS 공정을 이용하여 세포의 원활한 이동과 측정 분석에 사용되는 글라스에 채널 패턴 에칭을 위하여 포토리소그래피(photolithography)와 산화완충식각(BOE: buffered oxide etchant) 공정 조건, 세포 분석과 정보 전달에 사용되는 광섬유의 에칭을 위하여 산화완충식각 공정 조건, 세포나 유체를 칩과 외부의 전달 등에 사용되는 글라스의 홀을 위하여 전기화학방전(ECD: electro chemical discharge) 공정 조건, 글라스 접합을 위한 자외선반응접합(UVSA: ultraviolet sensitive adhesives) 공정 조건을 정립하였다. 또한 유체나 세포의 흐름 제어를 위한 라미나 흐름 조건, 적혈구세포에 대한 산란빔 파형을 측정하였다. 적혈구 실험을 통하여 출력 광섬유의 각도에 따른 산란빔이 출력측의 광섬유각도가 $0^{\circ}$일 때 약 17 V, 각도가 $5^{\circ}$일 때 약 10 V, 각도가 $10^{\circ}$일 때 약 6 V, 각도가 $15^{\circ}$일 때 약 4 V의 전압(Vpp)으로 측정되었다. 따라서 마이크로 세포 분석 바이오칩 제작의 소형화, 단순화, 공정신간 단축, 정량화하였고 적혈구의 광학적 특성을 측정을 측정함으로써 의공학(biomedical), 바이오칩공학(biochip), 반도체공학(semiconductor), 생물정보학(bioinformatics) 등의 응용과학 분야 발전에 기여할 것으로 기대한다.

Keywords

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