Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Controlling Structural and Electrical Properties of Pt Nanopowder-Dispersed SiO2 Film

Pt 나노분말이 분산된 SiO2 박막의 구조 및 전기적 특성 제어

  • Lee, Jae Ho (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Shin, In Joo (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Lee, Sung Woo (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Kim, Hyeong Cheol (Department of Materials Science and Engineering, Seoul National University of Science and Technology) ;
  • Choi, Byung Joon (Department of Materials Science and Engineering, Seoul National University of Science and Technology)
  • 이재호 (서울과학기술대학교 신소재공학과) ;
  • 신인주 (서울과학기술대학교 신소재공학과) ;
  • 이성우 (서울과학기술대학교 신소재공학과) ;
  • 김형철 (서울과학기술대학교 신소재공학과) ;
  • 최병준 (서울과학기술대학교 신소재공학과)
  • Received : 2014.09.11
  • Accepted : 2014.09.19
  • Published : 2014.10.28
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Abstract

Pt nanopowder-dispersed $SiO_2$ (SOP) films were prepared by RF co-sputtering method using Pt and $SiO_2$ targets in Ar atmosphere. The growth rate and Pt content in the film were controlled by means of manipulating the RF power of Pt target while that of $SiO_2$ was fixed. The roughness of the film was increased with increasing the power of Pt target, which was mainly due to the increment of the size and planar density of Pt nanopowder. It was revealed that SOP film formed at 10, 15, 20 W of Pt power contained 2.3, 2.7, and 3.0 nm of spherical Pt nanopowder, respectively. Electrical conductivity of SOP films was exponentially increased with increasing Pt power as one can expect. Interestingly, conductivity of SOP films from Hall effect measurement was greater than that from DC I-V measurement, which was explained by the significant increase of electron density.

Keywords

References

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