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Determining Two-Sided Surface Profiles of Micro-Optical Elements Using a Dual-Wavelength Digital Holographic Microscope With Liquids

  • 투고 : 2014.06.17
  • 심사 : 2014.09.25
  • 발행 : 2014.10.25

초록

In this paper, a method is proposed for simultaneously measuring the front and back surface profiles of transparent micro-optical components. The proposed method combines a dual-wavelength digital holographic microscope with liquids to record holograms at different wavelengths, and then numerically reconstructs the three-dimensional phase information to image the front and back sides of the sample. A theoretical model is proposed to determine the surface information, and imaging of an achromatic lens is demonstrated experimentally. Unlike conventional interferometry, our proposed method supports nondestructive measurement and direct observation of both front and back profiles of micro-optical elements.

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참고문헌

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