한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제13권4호
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  • Pages.7-12
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  • 2014
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  • 1598-6721(pISSN)
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  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
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광학 마이크로 피라미드 패턴의 제조 및 광특성 해석

Fabrication and analysis of optical micro-pyramid array-patterns

  • 이재령 (고려대학교 전자및정보통신공학과) ;
  • 전은채 (한국기계연구원 나노공정연구실) ;
  • 제태진 (한국기계연구원 나노공정연구실) ;
  • 우상원 (한국기계연구원 나노공정연구실) ;
  • 최두선 (한국기계연구원 나노공정연구실) ;
  • 유영은 (한국기계연구원 나노공정연구실) ;
  • 김휘 (고려대학교 전자및정보통신공학과)
  • Lee, Je-Ryung (School of Electronics and Information Engineering, Korea UNIV.) ;
  • Jeon, Eun-Chae (Dept. of Nano Manufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Je, Tae-Jin (Dept. of Nano Manufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Woo, SangWon (Dept. of Nano Manufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Choi, Do-Sun (Dept. of Nano Manufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Yoo, Yeong-Eun (Dept. of Nano Manufacturing Technology, Korea Institute of Machinery and Materials) ;
  • Kim, Hwi (School of Electronics and Information Engineering, Korea UNIV.)
  • 투고 : 2014.08.01
  • 심사 : 2014.09.01
  • 발행 : 2014.08.31
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초록

A transparent poly methyl methacrylate (PMMA) optical micro-pyramid array-pattern is designed and fabricated using an injection modeling technique. The device's optical characteristics are tested and analyzed theoretically. In the optical pattern generated using the fabricated PMMA pattern, the components, due to not only refraction but also diffraction, are observed simultaneously. Wave optic modeling and analysis reveals that the energy ratio between the diffraction and refraction in the optical pattern are dependent on the critical dimension of the optical pattern such that the refraction and diffraction tend to be directly and inversely proportional to the pattern dimension, respectively.

키워드

참고문헌

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피인용 문헌

  1. 방사광 LIGA 공정을 이용한 플라스틱 성형용 마이크로 금형 제작 vol.14, pp.4, 2014, https://doi.org/10.14775/ksmpe.2015.14.4.001
  2. A study on the analysis method of shape quality and the micro burr removal on a micro pyramid pattern using the micro MR fluid jet polishing system vol.25, pp.4, 2014, https://doi.org/10.1088/0964-1726/25/4/045001