한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제51권5호
  • /
  • Pages.375-379
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  • 2014
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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DC 스퍼터법과 유도결합 플라즈마를 이용한 마그네트론 스퍼터링으로 제작된 나노결정질 TiAlN 코팅막의 물성 비교 연구

A Comparative Study of Nanocrystalline TiAlN Coatings Fabricated by Direct Current and Inductively Coupled Plasma Assisted Magnetron Sputtering

  • 전성용 (목포대학교 신소재공학과) ;
  • 김세철 (목포대학교 신소재공학과)
  • Chun, Sung-Yong (Department of Advanced Materials Science and Engineering, Mokpo National University) ;
  • Kim, Se-Chul (Department of Advanced Materials Science and Engineering, Mokpo National University)
  • 투고 : 2014.07.29
  • 심사 : 2014.08.21
  • 발행 : 2014.09.30
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초록

Nanocrystalline TiAlN coatings were prepared by reactively sputtering TiAl metal target with $N_2$ gas. This was done using a magnetron sputtering system operated in DC and ICP (inductively coupled plasma) conditions at various power levels. The effect of ICP power (from 0 to 300 W) on the coating microstructure, corrosion and mechanical properties were systematically investigated using FE-SEM, AFM and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of TiAlN coatings. With increasing ICP power, the coating microstructure evolved from the columnar structure typical of DC sputtering processes to a highly dense one. Average grain size of TiAlN coatings decreased from 15.6 to 5.9 nm with increasing ICP power. The maximum nano-hardness (67.9 GPa) was obtained for the coatings deposited at 300 W of ICP power. The smoothest surface morphology (Ra roughness 5.1 nm) was obtained for the TiAlN coating sputtered at 300 W ICP power.

키워드

참고문헌

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피인용 문헌

  1. DC 마그네트론 스펏터를 이용한 ITO 박막의 실온 증착 및 특성 분석 vol.24, pp.1, 2014, https://doi.org/10.7471/ikeee.2020.24.1.59
  2. Characteristics of HfN coatings by inductively coupled plasma-assisted magnetron sputtering vol.58, pp.2, 2014, https://doi.org/10.1007/s43207-020-00084-3