DOI QR코드

DOI QR Code

Compact Model of a pH Sensor with Depletion-Mode Silicon-Nanowire Field-Effect Transistor

  • Yu, Yun Seop (Department of Electrical, Electronic and Control Engineering and IITC, Hankyong National University)
  • 투고 : 2014.03.04
  • 심사 : 2014.06.26
  • 발행 : 2014.08.30

초록

A compact model of a depletion-mode silicon-nanowire (Si-NW) pH sensor is proposed. This drain current model is obtained from the Pao-Sah integral and the continuous charge-based model, which is derived by applying the parabolic potential approximation to the Poisson's equation in the cylindrical coordinate system. The threshold-voltage shift in the drain-current model is obtained by solving the nonlinear Poisson-Boltzmann equation for the electrolyte. The simulation results obtained from the proposed drain-current model for the Si-NW field-effect transistor (SiNWFET) agree well with those of the three-dimensional (3D) device simulation, and those from the Si-NW pH sensor model also agree with the experimental data.

키워드

참고문헌

  1. P. Bergveld, "Thirty years of ISFETOLOGY: What happened in the past 30 years and what may happen in the next 30 years," Sens. Actuators B: Chem., Vol. 88, No. 1, pp. 1-20, 2003. https://doi.org/10.1016/S0925-4005(02)00301-5
  2. X. P. A. Gao, G. Zheng, and C. M. Lieber, "Subthreshold regime has the optimal sensitivity for nanowire FET biosensors," Nano Lett., Vol. 10, No. 2, pp. 547-552, 2010. https://doi.org/10.1021/nl9034219
  3. O. Knopfmacher, A. Tarasov, W. Fu, M. Wipf, B. Niesen, M. Calame, and C. Schonenberger, "Nernst limit in dual-gated Si-nanowire FET sensors," Nano Lett., Vol. 10, No. 6, pp. 2268-2274, 2010. https://doi.org/10.1021/nl100892y
  4. S. Zafar, C. D'Emic, A. Afzali, B. Fletcher, Y. Zhu and T. Ning, "Optimization of pH sensing using silicon nanowire field effect transistors with HfO2 as the sensing surface," Nanotechnol., Vol. 22, No. 40, pp. 405501, 2011. https://doi.org/10.1088/0957-4484/22/40/405501
  5. Y. Chen, X. Wang, S. Erramilli, P. Mohanty, and A. Kalinowski, "Silicon-based nanoelectronic fieldeffect pH sensor with local gate control," Appl. Phys. Lett., Vol. 89, p. 223512, 2006. https://doi.org/10.1063/1.2392828
  6. Y. L. Bunimovich, Y. S. Shin, W. Yeo, M. Amori, G. Kwong, and J. R. Heath, "Quantitative real-time measurements of DNA hybridization with alkylated nonoxidized silicon nanowires in electrolyte solution," J. Amer. Chem. Soc., Vol. 128, No. 50, pp. 16323-16331, 2006. https://doi.org/10.1021/ja065923u
  7. J. Yao, H. Yan, and C.M. Lieber, "A nanoscale combing technique for the large-scale assembly of highly aligned nanowires," Nature Nanotechnol., Vol. 8, No. 5, pp. 329-335, 2013. https://doi.org/10.1038/nnano.2013.55
  8. Y. S. Yu and S. W. Hwang, "Analytic Model of A Silicon Nanowire pH Sensor," J. Nanosicence Nanotechnogy, Vol. 11, No. 12, pp. 10809-10812, 2011. https://doi.org/10.1166/jnn.2011.3991
  9. J. P. Duarte, S. J. Choi, D. I. Moon, and Y. K. Choi, "A nonpiecewise model for long-channel junctionless cylindrical nanowire FETs," IEEE Electron Device Lett., Vol. 33, No. 2, pp. 155-157, Feb. 2012. https://doi.org/10.1109/LED.2011.2174770
  10. P. R. Nair and M. A. Alam, "Screening limited response of nanobiosensor," Nano Lett., Vol. 8, No. 5, pp. 1281-1285, 2008. https://doi.org/10.1021/nl072593i
  11. Y. S. Yu, N. Cho, S. W. Hwang, and D. Ahn, "Implicit continuous current-voltage model for surrounding-gate metal-oxide-semiconductor fieldeffect transistors (SGMOSFETs) including interface traps," IEEE Trans. Electron Devices, Vol. 58, No. 8, pp. 2520-2524, 2011. https://doi.org/10.1109/TED.2011.2156412
  12. Y. S. Yu, "A unified analytical current model for N- and P-type accumulation-mode (junctionless) surrounding-gate nanowire FETs," IEEE Trans. Electron Devices, Vol. 61, No. 8, pp.3007-3010, 2014. https://doi.org/10.1109/TED.2014.2329916
  13. D. E. Yates, S. Levine, T. W. Healy, "Site-binding model of the electrical double layer at the oxide/water interface," J. Chem. Soc. Faraday Trans. 1, Vol. 70, pp. 1807-1818, 1974. https://doi.org/10.1039/f19747001807
  14. Silvaco, Inc. SMARTSPICE Users' Manual. (2012). [Online]. Available: http://www.silvaco.com.
  15. P. Livi, K. Bedner, A. Tarasov, M. Wipf, Y. Chen, C. Schonenberger, A. Hierlemann, "A Verilog-A model for silicon nanowire biosensors: from theory to verification," Sensors and Actuators B: Chemical, Vol. 179, pp. 293-300, 2013. https://doi.org/10.1016/j.snb.2012.09.026
  16. ATLAS ver. 5. 18. 3. R Manual, Silvaco International, Santa Clara, CA (2012).
  17. G. Massobrio, M. Grattarola, G. Mattioli, and F. Mattioli, "ISFET-based Biosensor Modeling with SPICE," Sensors and Actuators B: Chemical, Vol. 1, pp. 401-407, 1990. https://doi.org/10.1016/0925-4005(90)80238-U