Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Synthesis and Properties of a Ge2Sb2Te5 Sputtering for Use as a Target by Spark Plasma Sintering

방전 플라즈마 소결에 의한 Ge2Sb2Te5 스퍼터링 타겟 제조 및 특성

  • Bang, C.W. (Department of Materials Science and Engineering, Yonsei University) ;
  • Kim, K.B. (Department of Nanotechnology and Advanced Materials Engineering, Sejong University) ;
  • Lee, J.K. (Division of Advanced Materials Engineering, Kongju National University)
  • 방창욱 (연세대학교 신소재공학과) ;
  • 김기범 (세종대학교 나노신소재공학과) ;
  • 이진규 (공주대학교 신소재공학부)
  • Received : 2014.03.13
  • Accepted : 2014.04.18
  • Published : 2014.04.28
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Abstract

In this study, we report the sintering behavior and properties of a $Ge_2Sb_2Te_5$ alloy powders for use as a sputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature and time, on the density and hardness of the target has been investigated in detail. Structural characterization was performed by scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differential scanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered $Ge_2Sb_2Te_5$ materials were 5.8976~6.3687 $g/cm^3$ and 32~75 Hv, respectively.

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