Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Performance Evaluation of Five-DOF Motion under Static and Dynamic Conditions of Ultra-precision Linear Stage

초정밀 직선 스테이지에서 5 자유도 운동의 정적 및 동적 성능 평가

  • Lee, Jae-Chang (School of Mechanical Engineering, Kyungpook National University) ;
  • Lee, Kwang-Il (School of Mechanical Engineering, Kyungpook National University) ;
  • Yang, Seung-Han (School of Mechanical Engineering, Kyungpook National University)
  • Received : 2014.01.08
  • Accepted : 2014.04.25
  • Published : 2014.05.01
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Abstract

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

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References

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