Journal of Korea Society of Industrial Information Systems (한국산업정보학회논문지)

Korea Society of Industrial Information Systems (한국산업정보학회)
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Characteristics analysis and Fabrication of Integrated Piezoresistive Temperature & Humidity Sensors

압저항형 온·습도 복합 센서 제작 및 특성 분석

  • 류정탁 (대구대학교 전자전기공학부)
  • Received : 2013.11.20
  • Accepted : 2014.04.10
  • Published : 2014.04.30
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Abstract

In this paper, we developed an intergrated piezoresistive temperature and humidity sensor using nano-technology, and evaluated the properties. In the measuring range from $20^{\circ}C$ to $80^{\circ}C$, output sensitivity of temperature was about 0.75mV/$1^{\circ}C$. Output sensitivity of humidity was about 1.35mV/10%(RH). Therefore, developed sensor suggests that it is possible applicable to the general residential environment.

본 논문에서는 나노기술을 적용한 압저항형 온 습도복합센서를 개발하여 특성을 평가 분석 하였다. 온도 변화에 대한 출력 감도는 $20{\sim}80^{\circ}C$에 이르는 측정구간에서 약 0.75mV/$1^{\circ}C$의 출력 값을 보였다. 습도 변화에 대한 감도는 약 1.35mV/10%(RH)의 결과를 나타내었다. 이와 같은 결과에 의하여 본 논문에서 개발한 센서는 일반적인 생활 주거 환경에 적용이 가능함을 시사해 준다.

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References

  1. Y.Yao, X.Chen, W.Ma, W.Ling, "Quartz Crystal Microbalance Humidity Sensors Based on Nanodiamond Sensing Films", IEEE Transactions on Nanotechnology, Vol. 13, No. 2, pp. 386-393, 2014. https://doi.org/10.1109/TNANO.2014.2305986
  2. D.W. Guo, F.A. Cardoso, R.Ferreira, E. Paz, S. Cardoso, P.P. Cardoso, "MgO-based magnetic tunnel junction sensors array for non-destructive testing applications", Journal of Applied Physics, Vol. 115, No. 17, pp. 513-516, 2014.
  3. A. Abdellah, A. Abdelhalim, M. Horn, G. Scarpa, P. Lugli, "Scalable Spray Deposition Process for High-Performance Carbon Nanotube Gas Sensors", IEEE Transactions on Nanotechnology, Vol. 12, No. 2, pp. 174-181, 2013. https://doi.org/10.1109/TNANO.2013.2238248
  4. B.A. Schnitz, D.X.u Guan, R.A. Malkin, "Design of an integrated sensor for in vivo simultaneous electrocontractile cardiac mapping" IEEE Transactions on Biomedical Engineering, Vol. 51, No. 2, pp. 355-361, 2004. https://doi.org/10.1109/TBME.2003.820388
  5. Zheng-Dong Lin, Chih-Hung Hsiao, Sheng-Joue Young, Chien-Sheng Huang, Shoou-Jinn Chang, Sheng-Bo Wang, "Carbon Nanotubes With Adsorbed Au for Sensing Gas" IEEE Sensors Journal, Vol. 13, No. 6, pp. 2423-2427, 2013. https://doi.org/10.1109/JSEN.2013.2256124
  6. S Wu, Q. Lin, Y. Yuen, Y.C. Tai, "MEMS flow sensors for nano-fluidic applications", The 13th Annual International Conference on Micro Electro Mechanical Systems, 2000. pp. 745 - 750
  7. H. San, Y. Li, Z. Song, Y. Yu, X. Chen, "Self-Packaging Fabrication of Silicon- Glass-Based Piezoresistive Pressure Sensor" IEEE Electron Device Letters, Vol. 34, No. 6, pp. 789-791, 2013. https://doi.org/10.1109/LED.2013.2258320
  8. S. Carrara, L. Bolomey, C. Boero, A. Cavallini, E. Meurville, G.D. Micheli, T. Rezzonico, M. Proietti, F. Proietti, "Single-metabolite Bio-Nano-Sensors and system for remote monitoring in animal models" IEEE Sensors 2011 Conference, october 2011, pp. 716-719
  9. J. T. Ryu, B. S. Cha, Y.B. Kim, B.H. Moon, "Development of industrial wireless temperature system", J. Korea Industrial Information System, Vol.14 No. 1, pp. 90-94, 2009.
  10. J.T. Ryu, "The development of fall detection system using 3-axis acceleration sensor and tilt sensor", J. Korea Industrial Information System, Vol. 18, No. 4, pp. 19-24, 2013. https://doi.org/10.9723/jksiis.2013.18.4.019
  11. C. Y. Park, B.H. Lim, J.T. Ryu, "Development of Gas Sensor Modules and Sensor Calibration Systems", J. Korea Industrial Information System, Vol. 15, No. 2 pp. 83-90, 2010.
  12. W. C. Jeaong, B. S. Cha, J. T. Ryu, "Design studies of the Temperature & Humidity measurement system on wireless environment", The Korean Sensor Society conference Vol. 15, No. 1, pp.195-196, 2004.
  13. W. C. Jeaong, B. S. Cha, J. T. Ryu, "Fabrication and Characteristics of the Piezoresistive Humidity Sensor Using Polyimide", The Korean Sensor Society conference Vol. 15, No. 1, pp.193-194, 2004.
  14. G. Gelach and K. Sager, "A piezoresistive humidity sensor" Sensors and Actuators A : Physical Vol. 43, No.1-3, pp. 181-184, 1994. https://doi.org/10.1016/0924-4247(93)00690-6
  15. R. Buchhold, A. Nakladal, G. Gerlach, P. Neumann, "Design studies on piezosistive humidity sensors" Sensors and Actuators B : Chemical, Vol. 53, No. 1 pp. 1-7 1998. https://doi.org/10.1016/S0925-4005(98)00297-4
  16. Hu-Min Jung, Yun-Kwon Shin, Sang-Bock Cho and Jong-Hwa Lee, "Design of Piezoresistive Smart Silicon Pressure Sensor", Journal of Engineering Research Vol. 32, No. 2, pp. 189-200, 2001.
  17. Yong-Ho Kim, Yong-Jun Kim, Kyung-I Kim and Joong-Hyun Kim, "A Capacitive Type Humidity Sensor Using a Polyimide Film For Hermeticity Measurement of Micro Packages", J. of Korean Sensors Society, Vol. 13, No. 4, pp. 132-136, 2004. https://doi.org/10.5369/JSST.2004.13.4.287
  18. Seong-Jeen Kim, "Study on the development of mesa-type humidity sensors using porous silicon layer" J. of Korean Sensors Society, Vol. 8, No. 1, pp. 32-37, 1999.
  19. K.Suzuki, Y. Ishizaka, K. Inoue, Y. Nabeta and T. Inuzuka, "Capacitive Humidity Sensor Using Polyphenol Resin", Technical Digest of the 11th Sensor Symposium, pp. 233-236, 1992.