Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Laser Direct Etching on Transparent Conductive Oxide Films Sputtered on Polycarbonate Substrates

PC 기판상에 스퍼터링된 투명전도 산화막의 레이저 식각 특성

  • Lee, Jeongmin (Department of Electronic Engineering, Gachon University) ;
  • Kwon, Sang Jik (Department of Electronic Engineering, Gachon University) ;
  • Cho, Eou Sik (Department of Electronic Engineering, Gachon University)
  • Received : 2014.01.23
  • Accepted : 2013.02.10
  • Published : 2014.03.01
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Abstract

As a method of simple patterning of transparent conductive oxide (TCO) films deposited on flexible substrates, laser direct etching was carried out on TCO films sputtered on polycarbonate (PC) substrates. As a result of different binding energies in TCO films, indium tin oxide (ITO) and indium gallium zinc oxide (IGZO) were more easily etched than zinc oxide with different $Nd:YVO_4$ laser beam conditions.

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References

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