Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Micro-crack Detection in Silicon Solar Wafer through Optimal Parameter Selection in Anisotropic Diffusion Filter

비등방 확산 필터의 최적조건 선정을 통한 태양전지 실리콘 웨이퍼의 마이크로 크랙 검출

  • Seo, Hyoung Jun (Graduate school, Korea National University of Transportation) ;
  • Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
  • 서형준 (한국교통대학교 대학원) ;
  • 김경범 (한국교통대학교 항공.기계설계학과)
  • Received : 2014.09.05
  • Accepted : 2014.09.22
  • Published : 2014.09.30
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Abstract

Micro-cracks in crystalline silicon wafer often result in wafer breakage in solar wafer manufacturing, and also their existence may lead to electrical failure in post fabrication inspection. Therefore, the reliable detection of micro-cracks is of importance in the photovoltaic industry. In this paper, an experimental method to select optimal parameters in anisotropic diffusion filter is proposed. It can reliably detect micro-cracks by the distinct extension of boundary as well as noise reduction in near-infrared image patterns of micro-cracks. Its performance is verified by experiments of several type cracks machined.

Keywords

References

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