Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of Nipkow Disk for High-Speed Confocal Probe Using Micro-lens and Pinhole Disks

마이크로 렌즈 디스크와 핀홀 디스크를 이용한 고속 공초점용 닙코 디스크 개발

  • Kim, Gee Hong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Hyung Seok (NanoSystem Co. LTD.) ;
  • Kim, Chang Kyu (NanoSystem Co. LTD.) ;
  • Lim, Hyung Jun (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Jae Jong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Choi, Kee Bong (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
  • Received : 2014.09.12
  • Accepted : 2014.11.25
  • Published : 2014.12.15
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Abstract

This paper discusses the fabrication process for a Nipkow disk using micro-lens and pinhole disks. The confocal measuring system that uses the Nipkow disk has the advantage in measuring speed, because the Nipkow disk can simultaneously provide confocal images of all pixels in a CCD camera without requiring a lateral scanning unit. A micro-lens configuration, which focuses illumination on a pinhole, overcomes the low optical efficiency of the Nipkow disk system and allows its use in practical applications. This paper describes how to design the Nipkow disk in terms of numerical aperture, particularly for measuring the height of solder bumps in packaging application and for hybrid processes combining mechanical and semiconductor processes.

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References

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