Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Double-Pitch Dual Grating Method for Detecting the Axial Offset in Roll System

2 배수 피치비를 갖는 이중 격자 측정법을 이용한 축방향 롤 회전 오차 측정

  • Received : 2013.10.17
  • Accepted : 2013.11.18
  • Published : 2013.12.01
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Abstract

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

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References

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