Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Effect of Electron Irradiation on the Properties of GZO/TiO2 Thin Films

전자빔 조사에 따른 GZO/TiO2 박막의 특성 변화

  • Kim, Seung-Hong (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Sun-Kyung (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, So-Young (School of Materials Science and Engineering, University of Ulsan) ;
  • Heo, Sung-Bo (School of Materials Science and Engineering, University of Ulsan) ;
  • Choi, Dong-Hyuk (Dongkook Ind. Co., Ltd.) ;
  • Son, Dong-Il (Dongkook Ind. Co., Ltd.) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • Received : 2013.08.23
  • Accepted : 2013.09.11
  • Published : 2013.11.30
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Abstract

We have considered the influence of electron irradiation energy of 300, 600 and 900 eV on the stuctural, electrical and optical properties of GZO/$TiO_2$ thin films prepared with RF magentron sputtering. The optical transmittance and electrical resistivity of the films were dependent on the electron's irradiation energy. The electron irradiated GZO/$TiO_2$ films at 900 eV are grown as a hexagonal wurtzite phase and the resistivity is decreased with electron irradiation energy. The GZO/$TiO_2$ films irradiated at 900 eV shows the lowest resistivity of $4.3{\times}10^{-3}{\Omega}cm$. The optical transmittance in a visible wave length region also increased with the electron irradiation energy. The film that electron irradiated at 900 eV shows 82% of optical transmittance and higher work function of 5.18 eV in this study.

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References

  1. K. T. R. Reddy and R. W. Miles : J. Cryst. Growth, 210 (2000) 516. https://doi.org/10.1016/S0022-0248(99)00868-4
  2. M. Yoshino, W. Wenas and K. akahas : Jpn. J. Appl. Phys, 32 (1993) 726. https://doi.org/10.1143/JJAP.32.726
  3. L. J. Meng and M. P. Dos santos : Thin Solid Films, 250 (1994) 26. https://doi.org/10.1016/0040-6090(94)90159-7
  4. D. E. Brodie and E. Dixon : Proc. 12th IEEE Photovoltaic Specialists Conf, New York, 1980, p. 468.
  5. O. Kluth, B. Rech, A. Loffl and H. Schock : Thin Solid Films, 351 (1999) 247. https://doi.org/10.1016/S0040-6090(99)00085-1
  6. G. H. Kim and K. S. Suh, 디스플레이용 플라스틱 기판의 현황, 전자통신동향분석, 21 (2006) 129.
  7. J. Fahlteich, M. Fahland, W. Schonberger and N. Schiller : Thin Solid Films 517 (2009) 3075. https://doi.org/10.1016/j.tsf.2008.11.089
  8. Z. Yu, Y. Li, F. Xia and W. Xue : Surf. Coat. Technol. 200 (2006) 5751. https://doi.org/10.1016/j.surfcoat.2005.08.144
  9. L. Miao : Appl. Surf. Sci. 212 (2003) 255.
  10. Y. S. Kim, S. B. Heo, H. M. Lee, Y. J. Lee, I. S. Kim, M. S. Kang, D. H. Choi, B. H. Lee, M. G. Kim and Daeil Kim : Applied Surface Science, 258 (2012) 3903. https://doi.org/10.1016/j.apsusc.2011.12.057
  11. S. B. Heo, J. Y. Chun, Y. J. Lee, H. M. Lee and Daeil. Kim : J. Kor. Soc. Heat., 25 (2012) 134. https://doi.org/10.12656/jksht.2012.25.3.134
  12. Y. J. Lee, H. M. Lee, S. B. Heo, Y. S. Kim, J. H. Chae and Daeil Kim : J. Kor. Soc. Heat., 24 (2011) 307.
  13. J. Y. Kim, S. I. Kim, K. Y. Kim, H. G. Kim, J. H. Jeon, Y. J. Jung, M. C. Kim, J. L. Lee and C. U. Lee : J. Kor. Vac. Soc., 21 (2012) 12. https://doi.org/10.5757/JKVS.2012.21.1.12

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