한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제26권10호
  • /
  • Pages.731-735
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  • 2013
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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비냉각형 적외선 센서로 응용하기 위한 반도성 YBa2Cu3O6+x 박막의 열처리 온도에 따른 구조적 전기적 특성

Structural and Electrical Properties of Semiconducting YBCO Thin Film Annealed at Various Temperatures for Uncooled Infrared Sensor Application

  • 이태호 (경상대학교 세라믹공학과) ;
  • 이성갑 (경상대학교 세라믹공학과) ;
  • 여진호 (경상대학교 세라믹공학과) ;
  • 정혜린 (경상대학교 세라믹공학과)
  • Lee, Tae-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Lee, Sung-Gap (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Yeo, Jin-Ho (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University) ;
  • Jung, Hye-Rin (Department of Ceramic Engineering, Engineering Research Institute, Gyeongsang National University)
  • 투고 : 2013.07.29
  • 심사 : 2013.09.11
  • 발행 : 2013.10.01
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초록

YBCO thin films on $SiO_2$/Si substrate were fabricated by spin-coaing of an alkoxide-derived precursor and heat treatment. The structural and electrical properties of the YBCO films were investigated as functions of annealing temperature at $600{\sim}800^{\circ}C$. Although YBCO single phase was not synthesized, dense films of YBCO matrix phase and minor second phases have been successfully fabricated at the annealing temperatures of $650{\sim}800^{\circ}C$. Thickness and temperature coefficient of resistance (TCR) of YBCO thin films with annealing temperature of $750^{\circ}C$ were 0.31 ${\mu}m$ and $-2.92%/^{\circ}C$, respectively.

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참고문헌

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