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Post Annealing Treatment Introducing an Isotropy Magnetorsistive Property of Giant Magnetoresistance-Spin Valve Film for Bio-sensor

바이오센서용 거대자기저항-스핀밸브 박막이 등방성 자기저항 특성을 갖게 하는 후열처리 조건 연구

  • Khajidmaa, P. (Department of Oriental Biomedical Engineering, Sangji University) ;
  • Park, Kwang-Jun (Department of Oriental Biomedical Engineering, Sangji University) ;
  • Lee, Sang-Suk (Department of Oriental Biomedical Engineering, Sangji University)
  • 카지드마 (상지대학교 보건과학대학 한방의료공학과) ;
  • 박광준 (상지대학교 보건과학대학 한방의료공학과) ;
  • 이상석 (상지대학교 보건과학대학 한방의료공학과)
  • Received : 2013.05.15
  • Accepted : 2013.06.10
  • Published : 2013.06.30

Abstract

The magnetic easy axis of the ferromagnetic layer for the dual-type GMR-SV (giant magnetoresistance-spin valve) having NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe multuilayer structure controlled by the post annealing treatment. The magnetoresistive curves of a dual-type IrMn based GMR-SV depending on the direction of the magnetic easy axis of the free and the pinned layers are measured by the different angles for the applied fields. By investigating the switching process of magnetization for an arbitrary measuring direction, the optimum annealing temperature having a steady and isotropy magnetic sensitivity of 2.0 %/Oe was $105^{\circ}C$. This result suggests that the in-plane orthogonal magnetization for the dual-type GMR-SV film can be used by a high sensitive biosensor.

NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe 이중 거대자기저항-스핀밸브(GMR-SV) 박막의 진공 후열처리 온도의존성을 조사하여 강자성층 자화용이축을 유도하였다. 자유층과 고정층의 자화용이축에 의존하는 이중 스핀밸브 박막의 자기저항곡선은 외부자기장 각도를 다르게 하면서 측정하였다. 열처리온도가 $105^{\circ}C$일 때, $0^{\circ}$$90^{\circ}$ 사이 임의 측정 각도에서 약 2.0 %/Oe인 자장감응도 특성을 얻었다. 이러한 결과는 면상 강자성층과 자유층을 면상에서 서로 직교한 자화방향 유도를 통하여 이중구조 GMR-SV 박막이 고감도 바이오센서로 사용할 가능성을 제시하였다.

Keywords

References

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