한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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나노포지셔너 개발을 위한 테스트벤치 제작

Manufacturing Test-bench for Developing Nanopositioner

  • Kwon, Ji Yong (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Park, Geun Je (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Ryu, Won Jin (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Lee, Chibum (Mechanical System and Design Engineering, Seoul National University of Science and Technology)
  • 투고 : 2013.04.01
  • 심사 : 2013.06.04
  • 발행 : 2013.06.15
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초록

In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.

키워드

참고문헌

  1. Slocum, A. H., 1992, Precision Machine Design, Society of Manufacturing Engineers, USA.
  2. Smith, S. T., Chetwynd, D. G., 1994, Ultra-Precision Mechanism Design, CRC Press, USA.
  3. Bushan, B., 2010, Handbook of Micro/Nano Tribology, 2nd Ed.,. CRC Press, USA.
  4. Shim, J. Y., 1997, A Precision XYZ-Stage for AFM Scanner Design, Analysis and Control, Master Thesis, KAIST, Korea.
  5. Kim, Y. S., 2003, Development of the Ultra Precision XYZ stage using the Piezo Actuator and Elastic Hinge for AFM, Master Thesis, Seoul Nat'l Univ., Korea.
  6. Sebastian, A., Pantazi, A., Cherubini, G., Eleftheriou, E., Lantz, M., Pozidis, H., 2005, Nanopositioning for probe storage, Proc. Amer. Control Conf., 4181-4186.
  7. Vettiger, P., Staufer, U., Kern, D. P., 1996, Special Issue on Nanotechnology, Microelectron. J. Eng., 32, 1-4. https://doi.org/10.1016/S0167-9317(96)81009-4
  8. Verma, S., Kim, W. J., Shakir, H., 2005, Multi-axis Maglev nanopositioner for precision manufacturing and manipulation application, IEEE Trans. Ind. Appl., 41:5 1159-1167. https://doi.org/10.1109/TIA.2005.853374
  9. Choi, K. B., Lee, J. J., Lim, H. J., Kim, G. H., 2011, A Piezo-driven Ultra-precision Stage for Alignment Process of a Contact-type Lithography, Journal of the KSMTE., 20:6 756-770.
  10. Meldrum, D. R., Pence, W. H., Moody, S. E., Cunningham. D. L., Holl. M., Wiktor. P. J., Saini. M., Moore. M. P., Jang. L. S., Kidd. M., Fisher. C., Cookson. A., 2001, Automated, integrated modules for fluid handling, thermal cycling and purification of DNA samples for high throughput sequencing and analysis, Proc. IEEE/ASME Int. Conf. Adv. Intell. Mechatron., 1211-1219.
  11. Fasik, J. C., 1998, An inchworm actuator for the next generation space telescope, Burleigh Instruments, Inc., Fishers, USA.
  12. Jeong, Y. H., Chae, K. W., Bae, J. H., 2011, Modularized Flexure-Hinge Nanopositioner Based on Four-Bar-Link-Mechanism, Journal of the Korean Society for Precision Engineering, 28:7 851-858.
  13. Jung, H. S., 2007, A Study on the Ultraprecision Linear Stage for Stylus Profiler, Master Thesis, Ajou Univ. Korea.
  14. ANSYS, 2005, ANSYS User's Manual Version, ANSYS Inc.

피인용 문헌

  1. Development of Rotational Nanoactuator Based on Four-Bar Linkage vol.23, pp.4, 2014, https://doi.org/10.7735/ksmte.2014.23.4.361