DOI QR코드

DOI QR Code

Simulation Method of Threshold Voltage Shift in Thin-film Transistors

박막트랜지스터의 문턱전압 이동 시뮬레이션 방안

  • Jung, Taeho (Department of Electronic and IT Media Engineering, Seoul National University of Science and Technology)
  • 정태호 (서울과학기술대학교 전자IT미디어공학과)
  • Received : 2013.04.21
  • Accepted : 2013.04.24
  • Published : 2013.05.01

Abstract

Threshold voltage shift caused by trapping and release of charge carriers in a thin-film transistor (TFT) is implemented in AIM-SPICE tool. Turning on and off voltages are alternatively applied to a TFT to extract charge trapping and releasing process. Each process is divided into sequentially ordered processes, which are numerically modeled and implemented in a computer language. The results show a good agreement with the experimental data, which are modeled. Since the proposed method is independent of TFT's behavior models implemented in SPICE tools, it can be easily added to them.

Keywords

References

  1. H. Klauk, Chem. Soc. Rev., 39, 2643 (2010). https://doi.org/10.1039/b909902f
  2. J. S. Park, W. J. Maeng, H. S. Kim, and J. S. Park, Thin Solid Films, 520, 1679 (2012). https://doi.org/10.1016/j.tsf.2011.07.018
  3. J. H. Kang, C. E. Kim, P. Moon, and I. Yun, IEEE Trans Dev. Mater. Reliab., 11, 112 (2011). https://doi.org/10.1109/TDMR.2010.2096508
  4. Y. R. Liu, R. Liao, P. T. Lai, and R. H. Yao, IEEE Trans Dev. Mater. Reliab., 12, 58 (2012). https://doi.org/10.1109/TDMR.2011.2163408
  5. I. T. Cho, J. M. Lee, J. H. Lee, and H. I. Kwon, Secmicond. Sci. Technol., 24, 1 (2008).
  6. W. B. Jackson, J. M. Marshall, and M. D. Moyer, Phys. Rev. B, 39, 1164 (1989). https://doi.org/10.1103/PhysRevB.39.1164
  7. A. A. Fomani and A. Nathan, J. Appl. Phys., 109, 084521 (2011). https://doi.org/10.1063/1.3569702
  8. C. L. Fan, Y. Y. Lin, B. S. Lin, J. Y. Chang, C. L. Fan, and H. C. Chang, J. Kor. Phy. Soc., 56, 1185 (2010). https://doi.org/10.3938/jkps.56.1185
  9. G. Gu, M. G. Kane, and S.-C. Mau, J. Appl. Phys., 101, 014504 (2007). https://doi.org/10.1063/1.2403241
  10. S. Sambandan, L. Zhu, D. Striakhilev, P. Servati, and A. Nathan, IEEE Elec. Dev. Lett., 26, 375 (2005). https://doi.org/10.1109/LED.2005.848116
  11. S. C. Deane, R. B. Wehrspohn, and M. J. Powell, Phys. Rev. B, 58, 12625 (1998). https://doi.org/10.1103/PhysRevB.58.12625
  12. X. Li, J. Qin, B. Huang, X. Zhang, and J. B. Bernstein, IEEE Trans. Dev. Mater. Reliab., 6, 247 (2006). https://doi.org/10.1109/TDMR.2006.876572
  13. T. Jung, Proc. 6th Int. Conf. on Convergence and Hybrid Information Technology (eds. G. Lee, D. Howard, J. J. Kang, and D. Slezak) (Daejeon, Korea, 2012) p. 453.
  14. T. Jung, J. KIEEME, 26, 92 (2013).
  15. R. B. Wehrspohn, M. J. Powell, and S. C. Deane, J. Appl. Phys., 93, 5780 (2003). https://doi.org/10.1063/1.1565689
  16. S. Zafar, A. Callegari, E. Gusev, and M. V. Fischetti, J. Appl. Phys., 93, 9298 (2003). https://doi.org/10.1063/1.1570933

Cited by

  1. Modeling of stretched-exponential and stretched-hyperbola time dependence of threshold voltage shift in thin-film transistors vol.117, pp.14, 2015, https://doi.org/10.1063/1.4917209