Efficiency Improvement with $Al_2O_3/SiN_x$ Rear Passivation of p-type Mono-crystalline Silicon Solar Cells

$Al_2O_3/SiN_x$ 후면 적층 패시베이션을 이용한 결정질 실리콘 태양전지의 효율 향상 연구

  • Cheon, Joo Yong (School of Materials Sci. & Engr., University of Ulsan) ;
  • Beak, Sin Hey (KCC Central Research Institute) ;
  • Kim, In Seob (School of Materials Sci. & Engr., University of Ulsan) ;
  • Chun, Hui Gon (School of Materials Sci. & Engr., University of Ulsan)
  • 천주용 (울산대학교 첨단소재공학부) ;
  • 백신혜 (KCC 중앙연구소) ;
  • 김인섭 (울산대학교 첨단소재공학부) ;
  • 천희곤 (울산대학교 첨단소재공학부)
  • Received : 2013.08.30
  • Accepted : 2013.09.23
  • Published : 2013.09.30

Abstract

Current research trends of solar cells has focused on the high conversion efficiency and low-cost production technology. Passivation technology that can be easily adapted to mass production. Therefore, this study conducted experiments with aim of the following two methods for the fabrication of high-efficiency crystalline silicon solar cells. In the first task, an attempt is formation of local Al-BSF to a number of locally doped dots to increase the conversion efficiency of solar cells to reduce the loss of $V_{oc}$ overcome. The second major task, rear surface apply in $Al_2O_3/SiN_x$ stack layer, $Al_2O_3$ prominent negative fixed charge characteristics. As the result of task, Local Al-BSF and $Al_2O_3/SiN_x$ stack layer applied to the p-type single crystalline silicon solar cells, the average $V_{oc}$ of 644mV, $I_{sc}$ of 918mV and conversion efficiency of 18.70% were obtained.

Keywords

References

  1. J.H. Mandelkorn, Lamneck Jr., "Simplified Fabrication of Back Surface Electric Field Silicon Cells and Novel Characteristics of Such Cells", Proceedings of the 9th IEEE photovoltaic specialists conference in New Yo 가, p.66-71, 1972
  2. M.Y. Ghannam, E. Demesmaecker, J. Nijs, R. Mertens, and R. van Overstraeten, "Two dimensional study of alternative back surface passivation methods for high efficiency silicon solar cells", Proceedings of the 11th European Photovoltaic Solar Energy Conference, Montreux, p45, 1992
  3. Aberle AG, "Crystalline Silicon Solar Cells - Advanced surface passivation and analysis", Centre for photovoltaic engineering, University of NSW: Australia, 1999
  4. B. Hoex, S.B.S. Heil, E. Langereis, M.C.M. van de Sanden, and W.M.M. Kessels, "Ultralow surface recombination of c-Si substrates passivated by plasmaassisted atomic layer deposited $Al_2O_3$", Appl. Phys. Lett. 89, 042112, 2006 https://doi.org/10.1063/1.2240736
  5. Jan Schmidt, Florian Werner, Boris Veith, Dimitri Zielke, Robert Bock, Veronica Tiba, Paul Poodt, Fred Roozeboom, Andrew Li, Andres Cuevas and Rolf Brendel, "Industrially relevant $Al_2O_3$ deposition techniques for the surface passivation of Si solar cells", 25th European Photovoltaic Sorlar Energy Conference, 2AO.1.6, 2010
  6. Benick, B. Hoex, M.C.M. van de Sanden, W.M.M. Kessels, O. Schultz and S.W. Glunz, "High efficiency n-type Si solar cells on $Al_2O_3$-passivated boron emitters", Appl. Phys. Lett. vol.92, 253504, 2008 https://doi.org/10.1063/1.2945287
  7. C. Kranz, S. Wyczanowski, S. Dorn, K. Weise, C. Klein, K. Bothe, T. Dullweber and R. Brendel, " Impact of the rear surface roughness on industrial-type PERC solar cells", 27th european Photovoltaic Energy conference, 2AO.1.5, 2012
  8. S. Dauwe, L. Mittelstadt, R. Hezel, "Experimental evidence of parasitic shunting in silicon nitride rear surface passivated solar cells" progress in photvoltaics: Res. Appl, vol.10 p.271-278, 2002 https://doi.org/10.1002/pip.420