Transactions on Electrical and Electronic Materials

  • 제14권1호
  • /
  • Pages.9-11
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  • 2013
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Properties of AZO/Ag/AZO Multilayer Thin Film Deposited on Polyethersulfone Substrate

  • Jung, Yu Sup (Department of Electrical Engineering, Gachon University) ;
  • Park, Yong Seo (Department of Electrical Engineering, Gachon University) ;
  • Kim, Kyung Hwan (Department of Electrical Engineering, Gachon University) ;
  • Lee, Won-Jae (Department of Electronic Engineering, Gachon University)
  • 투고 : 2011.11.07
  • 심사 : 2012.08.27
  • 발행 : 2013.02.25
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초록

The AZO/Ag/AZO multilayer films were deposited on polyethersulfone (PES) substrate by using facing target sputtering methods at room temperature. The AZO/Ag/AZO multilayer films with polymer substrate had advantages, such as low sheet resistance, high optical transmittance in visible range and stable mechanical properties. From the results, the AZO/Ag/AZO multilayer films (50/12/50 nm) demonstrated a sheet resistance of 11 ${\Omega}/{\square}$ and average transmittance of 87% in visible range (wavelength of 380-770 nm). Moreover, the multilayer showed stable mechanical properties compared to the single-layered AZO sample during the bending test due to the existence of the ductile Ag metal layer.

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참고문헌

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