A study on detecting process variation for process improvement in the process industry

장치산업에서 공정개선을 위한 공정변동 탐지에 관한 연구

  • Received : 2013.08.28
  • Accepted : 2013.12.13
  • Published : 2013.12.25


Because process variations have direct influence on yield rate in process industry, it is very important to understand process variations that occur accidentally. In process industry, quality variation due to the activities of process improvement and maintenance and chance effect such as change of work environment and difference in staffs' craftsmanship are mixed with each other, therefore it is difficult to actually detect minute process variations. In this study, objective and rational methods of detection that can detect minute process variations in process industry were designed referring to various methodologies of process management, and they were verified through similar examples.



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