Polymer Science and Technology (한국고분자학회지:고분자과학과기술)

The Polymer Society of Korea (한국고분자학회)
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Large-Area, Three-Dimensional Nanopatterning with Conformal Phase Masks

콘포말 위상 마스크를 이용한 대면적 3차원 나노패터닝

  • Park, Junyong (Department of Materials Science and Engineering, KAIST Institute for the Nanocentury, Graphene Research Center, KAIST) ;
  • Jeon, Seokwoo (Department of Materials Science and Engineering, KAIST Institute for the Nanocentury, Graphene Research Center, KAIST)
  • Published : 2013.10.25
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Abstract

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