전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제61권12호
  • /
  • Pages.1828-1835
  • /
  • 2012
  • /
  • 1975-8359(pISSN)
  • /
  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지
DOI QR코드

DOI QR Code

고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지

Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions

  • 투고 : 2012.10.12
  • 심사 : 2012.11.26
  • 발행 : 2012.12.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, a conceptual design and a detailed design of novel cylindrical magnetic levitation stage is introduced. This is came from planar-typed magnetic levitation stage. The proposed stage is composed of cylinder-typed permanent magnet array and semi-cylinder-typed 3 phase winding module. When a proper current is induced at winding module, a magnetic levitation force between the permanent magnet array and winding module is generated. The proposed stage can precisely move the cylinder to rotations and translations as well as levitations with the magnetic levitation force. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography under vacuum. Two methods are used to calculate required magnetic levitation forces. The one is 2D FEM analysis, the other is mathematical modeling. This paper shown that results of two methods are similar. An assistant plate is introduced to reduce required currents of winding module for levitations in vacuum. The mathematical model of cylindrical magnetic levitation stage is used for dynamic simulation of magnetic levitations. A lead-lag compensator is used for control of the model. Simulation results shown that the detail designed model of the cylindrical magnetic levitation stage with the assistant plate can be controlled very well.

키워드

참고문헌

  1. L Jay Guo, "Recent progress in nanoimprint technology and its applications", J. Phys. D: Appl. Phys. 37, pp.123-141, 2004. https://doi.org/10.1088/0022-3727/37/11/R01
  2. C.M. Sotomayor Torres, S. Zankovych, J. Seekamp, A.P. Kam, C. Clavijo Cedeno, T. Hoffmann, J. Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M.V. Maximov, B. Heidari, "Nanoimprint lithography: an alternative nanofabrication approach", Materials Science and Engineering C 23, pp.23-31, 2003. https://doi.org/10.1016/S0928-4931(02)00221-7
  3. Shuhuai Lan, Hyejin Lee, Jun Ni, Soohun Lee, Moongu Lee, "Survey on Roller-type Nanoimprint Lithography (RNIL) Process", ICSMA 2008, pp.371-376, April 2008.
  4. Shih Chun Tseng, Wen Yang Peng, Yi Fan Hsieh, Ping Jen Lee, Wen Lang Lai, "Electron Beam Lithography on Cylindrical Roller", Journal Microelectronic Engineering, Vol. 87, Issue 5-8, pp.943-946, May 2010. https://doi.org/10.1016/j.mee.2009.11.156
  5. Noriyuki Unno, Jun Taniguchi, and Kiyoshi Ishikawa, "Fabrication of a seamless roll mold using inorganic electron beam resist with postexposure bake", Journal of Vacuum Science & Technology B, Vol. 29, Issue 6, October 2011.
  6. Shinshi Tadahiko, Zhang X, Shimokobe Akira, "Realization of High Precision Rotation Using Magnetic Bearing", Machine Design and Tribology Division Meeting in JSME, Vol. 3, pp.167-168, 2003.
  7. Zhenyao Xu, Fengge Zhang, Dong-Hee Lee, Jin-Woo Ahn, "Design and Analysis of Novel 12/14 Hybrid Pole Type Bearingless Switched Reluctance Motor with Short Flux Path", Journal of Electrical Engineering & Technology, Vol.7, No.5, pp.705-713, 2012. https://doi.org/10.5370/JEET.2012.7.5.705
  8. Franz Zurcher, Thomas Nussbaumer, Johann W. Kolar, "Principles of Magnetic Levitation Force and Motor Torque Generation by Superposition of Harmonics in Bearingless Brushless Motors", IECON 2009 Proceedings, pp.1242-1247, 2009.
  9. Thomas Reichert, Johann W. Kolar, Thomas Nussbaumer, "Design Study for Exterior Rotor Bearingless Permanent Magnet Machines", Energy Conversion Congress and Exposition(ECCE), pp.3377-3382, 2011.
  10. P. Kascak, T. Dever, R. Jansen, A. Nagorny, and K. Loparo, "Motoring Performance of a Conical Pole-Pair Separated Bearingless Electric Machine", in the Conference Record of IEEE EnergyTech, May 2011.
  11. Won-jong Kim, David L. Trumper, Jeffrey H. Lang, "Modeling and Vector Control of Planar Magnetic Levitator", IEEE Trans. On Industry Applications, Vol. 34, No. 6, pp.1254-1262, 1998. https://doi.org/10.1109/28.738999
  12. Jeong-Woo Jeon, Mitica Caraiani, Hyeon-Seok Oh, Sungshin Kim, "Experiments of a Novel Magnetic Levitation Stage for Wide Are Movements", Journal of Electrical Engineering & Technology, Vol. 7, No. 4, pp.558-563, 2012. https://doi.org/10.5370/JEET.2012.7.4.558

피인용 문헌

  1. Nanopatterning on the cylindrical surface using an E-beam pre-mapping algorithm vol.29, pp.1, 2018, https://doi.org/10.1088/1361-6439/aaea48