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롤투롤 인쇄전자공정에서 중첩정밀도 향상을 위한 정렬패턴과 위치 측정시스템

Alignment Patterns and Position Measurement System for Precision Alignment of Roll-to-Roll Printing

  • 서영원 (충남대학교 기계공학과) ;
  • 임성진 (서울대학교 차세대융합기술연구원) ;
  • 오동호 (충남대학교 기계공학과)
  • Seo, Youngwon (Dept. of Mechanical Engineering, Chungnam Nat'l Univ.) ;
  • Yim, Seongjin (Advanced Institutes of Convergence Technology, Seoul Nat'l Univ.) ;
  • Oh, Dongho (Dept. of Mechanical Engineering, Chungnam Nat'l Univ.)
  • 투고 : 2012.07.27
  • 심사 : 2012.08.15
  • 발행 : 2012.12.01

초록

인쇄전자는 RFID 나 유연 디스플레이 등의 전자회로나 소자를 인쇄방식으로 제작하는 공정이다. 특히 롤투롤과 같은 웹 이송방식 프린팅은 얇은 필름형태의 웹(Web)에 그라비아 인쇄나 고속 잉크젯과 같은 방법으로 이송중인 웹 상에 회로를 형성하는 공법이다. 이 공정은 생산단가가 저렴하고 고속생산이 가능하다는 이점이 있다. 다층구조를 가지는 회로나 디바이스를 생산할 때, 층과 층을 얼마나 정확하게 중첩시켜 인쇄하는가 하는 것은 인쇄된 전자회로의 집적도와 성능을 결정짓는 중요한 요소이다. 인쇄전자공법을 상용화하기 위해서 높은 중첩정밀도 구현이 선행되어야 한다. 본 연구에서는 롤투롤 인쇄방식에서 중첩정밀도의 향상을 위한 위치측정 시스템을 제안하고 신뢰성을 확인하였다. 또한 웹이 변형되었을 때의 측정 강인성도 실험적으로 확인하였다.

Printed electronics is a technology used for forming electronic circuits or devices, and it is used in the manufacture of many products such as RFID tags, solar cells, and flexible display panels with a much lower cost than in the case of semiconductor process technology. Web-guide-type printing such as roll-to-roll printing is a method used to produce printed electronic devices in a large volume. To commercialize such products, highly precise alignment between printed layers is required. In this study, a highly precise alignment system is proposed, and some experimental results are compared with those obtained using a laser surface vibrometer to illustrate the reliability of the proposed system. The robustness of the proposed system to web deformation is also considered experimentally.

키워드

참고문헌

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피인용 문헌

  1. Lateral Position Measurement System for Precision Alignment of Roll-to-Roll Printing Using Alignment Patterns and Quantity of Light vol.39, pp.9, 2015, https://doi.org/10.3795/KSME-A.2015.39.9.879