Fabrication and improvement of diffraction grating with femtosecond and $CO_2$ laser

레이저를 이용한 회절격자 제작 및 효율 향상 연구

  • 최훈국 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
  • 손익부 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
  • 노영철 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
  • 김진태 (조선대학교 광기술공학과 레이저응용연구실)
  • Received : 2012.06.07
  • Accepted : 2012.06.26
  • Published : 2012.06.30

Abstract

We fabricated the diffraction grating on the surface of fused silica glass using a femtosecond laser. The grooves of diffraction grating has a lot of micro crack and debris result in reduced diffraction efficiency. So, we polished the diffraction grating with $CO_2$ laser beam. With different scan number of $CO_2$ laser beam, we observed the image of diffraction grating and measured the diffraction efficiency.

Keywords