Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

  • Okuyama, Masanori (Institute for NanoScience Design, Osaka University) ;
  • Yamashita, Kaoru (Graduate School of Science and Technology, Kyoto Institute of Technology) ;
  • Noda, Minoru (Graduate School of Science and Technology, Kyoto Institute of Technology) ;
  • Sohgawa, Masayuki (Graduate School of Engineering Science, Osaka University) ;
  • Kanashima, Takeshi (Graduate School of Engineering Science, Osaka University) ;
  • Noma, Haruo (Advanced Telecommunications Research Institute International)
  • Published : 2012.10.25
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Abstract

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

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References

  1. M. Onishi, Z. -Luo, T. Odashima, S. Hirano, K. Tahara, T. Mukai, 2007 IEEE Int. Conf. on Robotics and Automation, Roma, Italy, April 10-14, 3128 (2007).
  2. M. Fujii, W. Inamura, H. Murakami, K. Tanaka, K. Kosuge, Proc. 2007 IEEE. Int. Conf. Robotics Biomimetics (2007) p.816 [DOI : http://dx.doi.org/10.1109/ROBIO.2007.4522268].
  3. K. Noda, Y. Hashimoto, Y. Tanaka, I. Shimoyama, Transducers 2009, Denver CO, USA (2009) p.2176.
  4. M. H. Lee, H. R. Nicholls, Mechatronics 9, 1 (1999) [DOI : http:// dx.doi.org/ 10.1016/S0957-4158(98)00045-2].
  5. R. S. Dahiya, G. Metta, M. Valle, G. Sandini, IEEE Trans. Robotics 26, 1(2010) [DOI : http://dx.doi.org/10.1109/TRO.2009.2033627].
  6. B. T. Khuri-Yakub, C.H. Cheng, F.L. Degertekin, S. Ergun, S. Hansen, X.C. Jin, O. Oralkan, Jpn. J. Appl. Phys. 39, 2883 (2000) [DOI: http://dx.doi.org/10.1143/JJAP.39.2883].
  7. S. Aoyagi, K. Furukawa, K. Yamashita, T. Tanaka, K. Inoue, M. Okuyama, Jpn. J. Appl. Phys. 46, 4595 (2007) [DOI: http:// dx.doi.org/10.1143/JJAP.46.4595].
  8. X. Jin, I. Ladabaum, B. T. Khuri-Yakub, IEEE J. Microelectromech. Syst. 7, 295 (1998) [DOI : http://dx.doi. org/10.1109/84.709646] .
  9. J. J. Neumann, D.W. Greve, I. J. Oppenheim, Comparison of piezoresistive and capacitive ultrasonic transducers, in: SPIE Smart Structure Conference 2004, San Diego, USA, March 14-18, 2004, pp. 230-238.
  10. Y. Hashimoto, A. Nakai, H. Kawano, K. Matsumoto, I. Shimoyama, in: Asia Pacific Conference of Transducers and Micro- NanoTechnologies 2008, Vol. 2, Tainan, Taiwan, June 22-25, 2008, pp. 2-3.
  11. K. Ohtani, M. Okuyama, Y. Hamakawa, $PbTiO_{2}$ thin film ultrasonic microsensor fabricated on Si wafer, Jpn. J. Appl. Phys. Suppl. 23, 13 (1984).
  12. J. T. Bernstein, S. L. Finberg, K. Houston, L. C. Niles, H. D. Chen, L. E. Corss, K. K. Lee, K. Udayakumar, IEEE Trans. Ultrason. Ferro. Freq. Cont. 44, 960 (1997) [DOI : http://dx.doi.org/10.1109/58.655620].
  13. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, P. Gaucher, IEEE Ultrason. Symp. Proc., New York , October 7-10 (2001) p. 907. [DOI : http://dx.doi.org/10.1109/ULTSYM.2001.991867].
  14. Z. H. Wang, J.M. Miao, T. Xu, G. Barbastathis, M. Triantaffylou, Tech. Dig. Transducers 2009, Denver, USA, June 21-25, 2009, p. 1553-1556.
  15. K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, Y. Suzuki, Sens. Actuators A 97-98, 302 (2002) [DOI : http://dx.doi.org/10.1016/S0924-4247 (02) 00037-7].
  16. K. Yamashita, T. Yoshizaki, M. Noda, M. Okuyama, IEEJ Trans. on Sensors and Micromachines 131, 235(2011) [DOI: http:// dx.doi.org/10.3938/jkps.55.902]
  17. K. Yamashita, T. Yoshizaki, M. Noda, M. Okuyama, J. Korean Phys. Soc. 55, 902 (2009). [DOI: http://dx.doi.org/10.3938/jkps.55.902].
  18. S. Aoyagi, Y. Kamiya, S. Okabe, Jpn. J. Appl. Phys. 31-1 (Suppl.), 263 (1991).
  19. K. Yamashita, H. Nishimoto, M. Okuyama, Sens. Actuators A 139, 118 (2007). https://doi.org/10.1016/j.sna.2007.04.048
  20. K. Yamashita, T. Watanabe, T. Yoshizaki, M. Noda, M. Okuyama, Sensors and Actuators A 165, 54 (2011)[ DOI:10.1016/j.sna.2010.04.007].
  21. K. Yamashita, M. Okuyama, Sens. Actuators A 127 (2006) 119-122 [DOI : http://dx.doi.org/10.1016/j.sna.2005.11.001].
  22. K. Yamashita, L. Chansomphou, H. Murakami and M. Okuyama, Sensors and Actuators A 114, 147 (2004) [ DOI: http://dx.doi.org/10.1016/j.sna.2003.11.015].
  23. Z. Chu, P. M. Sarro, S. Middelhoek, Sens. Actuators A 54, 505 (1996) [DOI : http://dx.doi.org/10.1016/S0924-4247(95)01190-0].
  24. K. Noda, K. Hoshino, K. Matsumoto, and I. .Shimoyama, Sens. Actuators A 127, 295 (2006) [DOI : http://dx.doi.org/10.1016/j.sna.2005.09.023].
  25. D. J. Heever, K. Schreve, C. Scheer, IEEE Sens. J. 9, 29(2009) [DOI : 10.1109/JSEN.2008.2008891].
  26. C.-S. Park, J. Park, D. -W. Lee, Microeletron. Eng. 86, 1250(2009) [DOI : http://dx.doi.org/10.1016/j.mee.2008.12.072].
  27. Y.-C. Liu, C.-M. Sun, L.-Y. Lin, M.-H. Tsai, and W. Fang, Transducers 2009, (2009) p.2190.
  28. M. Shimojo, T. Araki, A. Ming, M. Ishikawa, IEEE Sens. J. 10, 822 (2010) [DOI : 10.1109/JSEN.2009.2034982].
  29. C.-S. Kim, B. K. Kang, J. H. Jung, M. J. Lee, H. B. Kim, S. S. Oh, S. H. Jang, H. J. Lee, H. Kastuyoshi, J. K. Shin, Jpn. J. Appl. Phys. 49, 03CC03 (2010) [DOI : http://dx.doi.org/10.1143/JJAP.49.03CC03].
  30. M. Sohgawa, Y. M. Huang, T. Kanashima, K. Yamashita, M. Noda, M. Okuyama, H. Noma, Transducers'07, Lyon, France (2007) p.1461.
  31. M. Sohgawa, Y. -M. Huang, M. Noda, T. Kanashima, K. Yamashita, M. Okuyama, M. Ikeda, H. Noma, Mater. Res. Soc. Symp. Proc.1052 (2008) p.151 [DOI: http://dx.doi.org/10.1557/PROC-1052-DD04-07].
  32. M. Sohgawa, H. Onishi, T. Mima, Y. -M. Huang, T. Kanashima, K. Yamashita, M. Noda, M. Okuyama, M. Ikeda, H. Noma, Asia-Pacific Conf. on Transducers and Micro-Nano Tech., Tainan, Taiwan (2008).
  33. M. Sohgawa, T. Mima, H. Onishi, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, M. Higuchi, H. Noma, Transducers 2009, Denver CO, USA (2009) p.284.
  34. M. Sohgawa, T. Uematsu, W. Mito, T. Kanashima, M. Okuyama, H. Noma, Jpn. J. Appl. Phys. 50, 06GM08 (2011) [DOI: http:// dx.doi.org/10.1143/JJAP.50.06GM08].
  35. H. Onishi, M. Sohgawa, H. Tachibana, Y. M. Huang, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, H. Noma, IEEJ Trans. on Sensors and Micromachines 129, 411(2009) [DOI : http:// dx.doi.org/10.1541/ieejsmas.129.411].
  36. M. Sohgawa, D. Hirashimaa, Y. Moriguchia, T. Uematsua, W. Mito, T. Kanashima, M. Okuyama and H. Noma, to be published in Sensors and Actuators A.
  37. W. Mito, H. Yamazoe, S. Yoshida,.M. Tada, M. Sohgawa, T. Kanashima, M. Okuyama, and H. Noma, The 8th France-Japan and 6th Europe-Asia Congress on Mechanics, Yokohama, Japan, 2010 Nov 22-24) p. 260.

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