Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and Characterization of Multi-layered Thick Films by Room Temperature Powder Spray in Vacuum Process

상온 진공 분말 분사 공정을 이용한 다층 박막 소재의 제조 및 전기적 특성

  • Ryu, Jung-Ho (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Ahn, Cheol-Woo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Kim, Jong-Woo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Choi, Jong-Jin (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Yoon, Woon-Ha (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Hahn, Byung-Dong (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Choi, Joon-Hwan (Korea Institute of Materials Science (KIMS), Functional Ceramics Group) ;
  • Park, Dong-Soo (Korea Institute of Materials Science (KIMS), Functional Ceramics Group)
  • 류정호 (재료연구소 기능세라믹연구실) ;
  • 안철우 (재료연구소 기능세라믹연구실) ;
  • 김종우 (재료연구소 기능세라믹연구실) ;
  • 최종진 (재료연구소 기능세라믹연구실) ;
  • 윤운하 (재료연구소 기능세라믹연구실) ;
  • 한병동 (재료연구소 기능세라믹연구실) ;
  • 최준환 (재료연구소 기능세라믹연구실) ;
  • 박동수 (재료연구소 기능세라믹연구실)
  • Received : 2012.07.05
  • Accepted : 2012.07.23
  • Published : 2012.08.01
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Abstract

Room temperature powder spray in vacuum process, so called Aerosol deposition (AD) is a room temperature (RT) process to fabricate thick and dense ceramic films, based on collision of solid ceramic particles. This technique can provide crack-free dense thin and thick films with thicknesses ranging from sub micrometer to several hundred micrometers with very fast deposition rates at RT. In addition, this technique is using solid particles to form the ceramic films at RT, thus there is few limitation of the substrate and easy to control the compositions of the films. In this article, we review the progress made in synthesis of piezoelectric thin/thick films, multi-layer structures, NTC thermistor thin/thick films, oxide electrode thin films for actuators or sensor applications by AD at Korea Institute of Materials Science (KIMS) during the last 4 years.

Keywords

References

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