한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제21권2호
  • /
  • Pages.311-315
  • /
  • 2012
  • /
  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지
DOI QR코드

DOI QR Code

반도체 약액용 자동제어 플라스틱 밸브의 내부 유동해석

Internal Flow Analysis and Structural Design in Plastic Automatic Control Valve for the Semiconductor Chemical Liquid

  • 투고 : 2011.04.30
  • 심사 : 2011.12.13
  • 발행 : 2012.04.15
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Diaphragm type noncontact automatic control valve is a valve for controling acidic PR(Photo Resist) liquid used in the semiconductor process. PR is photosensitive liquid that changes phases depending on light transmittance. PR is very toxic and expensive; the purpose of this paper is to address methods that prevent loss due to leaks. The design of noncontact precise automatic control valve is expected to play an important role in controlling fluid flow, therefore influencing energy conservation and environmental improvement. In this paper, diaphragm type automatic control valve's part design, assembly and simulation are introduced. Also, through the analysis of fluid flow the valve's internal velocity, pressure, and turbulent intensity are interpreted. This paper proposes to contribute to the improvement of the valve's performance.

키워드

참고문헌

  1. Kim, J. Y., Kwac, L. K., An, J. S., Yang, D. J., Song, K. S., and Park, K. H., 2004, "The Flow Analysis for Vibration and Noise Diagnostic of Vacuum Cleaner Fan Motor," KSMTE, Vol. 13, No. 4, pp. 56-63
  2. Goldenberg, A. A., and Bezerghi, A., 1985, "A Preview Approach to Force Control of Robot Manipulators," Mechanism and Machine Theory, Vol. 20, No. 5, pp. 449-464. https://doi.org/10.1016/0094-114X(85)90049-7
  3. Massey, B. S, 1989, Mechanics of Fluid, Chapman and hall, London, pp. 273-300.
  4. White, F. M., 1974, Viscous Fluid Flow, McGraw-Hill, New York, pp. 163-189.
  5. Bernard, P., 2002, Turbulent Flow : Analysis, Measurment, and Prediction, Wiley, New York, pp. 156-211.
  6. ANSYS, 2005, Ansys Fluent Manual : GAMNIT 2.x Basic Training Notes, ATES.
  7. ANSYS, 2005, Ansys Fluent Manual : FLUENT 6.x Advanced Training Notes, ATES.

피인용 문헌

  1. Flow Analysis due to the Configuration of Automotive Spoiler vol.24, pp.6, 2016, https://doi.org/10.7467/KSAE.2016.24.6.677
  2. Control Speed Improvement of Chemical Liquid Flow Control Device for Semiconductor Manufacturing Process vol.38, pp.6, 2012, https://doi.org/10.7736/jkspe.021.015