Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Internal Flow Analysis and Structural Design in Plastic Automatic Control Valve for the Semiconductor Chemical Liquid

반도체 약액용 자동제어 플라스틱 밸브의 내부 유동해석

  • Received : 2011.04.30
  • Accepted : 2011.12.13
  • Published : 2012.04.15
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Abstract

Diaphragm type noncontact automatic control valve is a valve for controling acidic PR(Photo Resist) liquid used in the semiconductor process. PR is photosensitive liquid that changes phases depending on light transmittance. PR is very toxic and expensive; the purpose of this paper is to address methods that prevent loss due to leaks. The design of noncontact precise automatic control valve is expected to play an important role in controlling fluid flow, therefore influencing energy conservation and environmental improvement. In this paper, diaphragm type automatic control valve's part design, assembly and simulation are introduced. Also, through the analysis of fluid flow the valve's internal velocity, pressure, and turbulent intensity are interpreted. This paper proposes to contribute to the improvement of the valve's performance.

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References

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  2. Control Speed Improvement of Chemical Liquid Flow Control Device for Semiconductor Manufacturing Process vol.38, pp.6, 2012, https://doi.org/10.7736/jkspe.021.015