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Recycling and refining of tantalum scraps by electron beam melting

전자빔용해법(溶解法)에 의한 탄탈럼 스크랩의 재활용(再活用) 및 정련(精鍊)

  • Lee, Back-Kyu (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Oh, Jung-Min (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Choi, Good-Sun (Gangwon Industrial Technology Research Center, Research Institute of Industrial Science & Technology) ;
  • Kim, Hyung-Seok (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources) ;
  • Lim, Jae-Won (Mineral Resources Research Division, Korea Institute of Geoscience and Mineral Resources)
  • 이백규 (한국지질자원연구원 광물자원연구본부) ;
  • 오정민 (한국지질자원연구원 광물자원연구본부) ;
  • 최국선 (포항산업과학연구원 강원산업기술연구소) ;
  • 김형석 (한국지질자원연구원 광물자원연구본부) ;
  • 임재원 (한국지질자원연구원 광물자원연구본부)
  • Received : 2012.02.02
  • Accepted : 2012.03.30
  • Published : 2012.04.30

Abstract

The refining effect of tantalum by electron beam melting(EBM) process for recycling tantalum scraps was investigated in the study. The purity of the tantalum metals refined by EBM was evaluated using glow discharge mass spectrometry (GDMS). From the result of GDMS, most impurities in the tantalum metals were removed by EBM down to a few mass ppm levels. The purity of the refined tantalum scraps was improved up to 5N (99.9991%) from 4 N (99.996%) of the initial tantalum scraps. The amount of metallic impurities in the tantalum was decreased from 30 ppm to 8 ppm. In addition, the gaseous impurities in the tantalum were decreased from 470 ppm to 50 ppm. Therefore a possibility of refining method for recycling tantalum scraps by EBM process was confirmed in this study.

본 연구는 전자산업용 탄탈럼 스크랩의 재활용을 위하여 전자빔 용해에 의한 정련 효과를 조사 하였고 정련된 탄탈럼의 극미량 불순물은 글로방전 질량분석기를 이용하여 분석하였다. 탄탈럼 내 대부분의 불순물은 전자빔 용해에 의하여 수 ppm 수준으로 제거되어 초기 탄탈럼 스크랩의 순도인 4 N(99.996%)급에서 5 N(99.9991%)급으로 향상되었다. 탄탈럼 내 금속 불순물의 경우 초기 30 ppm에서 전자빔 반복 용해에 의해 8 ppm으로 감소된 것을 확인하였다. 또한 탄탈럼 내 가스 불순물의 경우 초기 470 ppm에서 전자빔 반복 용해에 의해 50 ppm으로 크게 감소하였다. 본 연구 결과를 통하여 탄탈럼 스크랩에 있어서 전자빔 용해에 의한 재활용 가능성 및 반복 용해에 의한 정련 효과를 확인하였다.

Keywords

References

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